PMID- 11327502
OWN - NLM
STAT- MEDLINE
DCOM- 20010607
LR  - 20180925
IS  - 0018-9294 (Print)
IS  - 0018-9294 (Linking)
VI  - 48
IP  - 3
DP  - 2001 Mar
TI  - Characteristics of silicon nitride after O2 plasma surface treatment for pH-ISFET 
      applications.
PG  - 340-4
AB  - Silicon nitride (Si3N4) sensing gate pH-ion-selective field effect transistors 
      (ISFETs) were treated by 2.54-GHz microwave O2 plasma, the results show the ISFET 
      sensitivity has an advantage up to 24% increment after the plasma treatment. 
      Electron spectroscopy for chemical analysis (ESCA) is used to make sure that the 
      plasma treatment is not just a native oxide cleaning procedure. The samples, 
      which were immobilized with glutaraldehyde used as a bifunctional reagent and 
      3-aminopropyItriethoxysilane used as an adhesion promoter were studied. The 
      binding force between the glucose oxidase and glutaraldehyde immobilized samples, 
      and the element concentrations of nitrogen in 3-aminopropyltriethoxysilane 
      immobilized samples are higher which were treated by plasma.
FAU - Yin, L T
AU  - Yin LT
AD  - Department of Bio-Medical Engineering, Chung Yuan Christian University Chung-Li, 
      Taiwan, ROC.
FAU - Chou, J C
AU  - Chou JC
FAU - Chung, W Y
AU  - Chung WY
FAU - Sun, T P
AU  - Sun TP
FAU - Hsiung, S K
AU  - Hsiung SK
LA  - eng
PT  - Journal Article
PT  - Research Support, Non-U.S. Gov't
PL  - United States
TA  - IEEE Trans Biomed Eng
JT  - IEEE transactions on bio-medical engineering
JID - 0012737
RN  - 0 (Propylamines)
RN  - 0 (Silanes)
RN  - 0 (Silicon Compounds)
RN  - EC 1.1.3.4 (Glucose Oxidase)
RN  - L8S6UBW552 (amino-propyl-triethoxysilane)
RN  - QHB8T06IDK (silicon nitride)
RN  - S88TT14065 (Oxygen)
RN  - T3C89M417N (Glutaral)
SB  - IM
MH  - Glucose Oxidase/chemistry
MH  - Glutaral/chemistry
MH  - Hydrogen-Ion Concentration
MH  - *Ion-Selective Electrodes
MH  - *Materials Testing
MH  - Microwaves
MH  - Oxygen/*chemistry
MH  - Propylamines
MH  - Sensitivity and Specificity
MH  - Silanes/chemistry
MH  - Silicon Compounds/*chemistry
MH  - Surface Properties
MH  - Transistors, Electronic
EDAT- 2001/05/01 10:00
MHDA- 2001/06/08 10:01
CRDT- 2001/05/01 10:00
PHST- 2001/05/01 10:00 [pubmed]
PHST- 2001/06/08 10:01 [medline]
PHST- 2001/05/01 10:00 [entrez]
AID - 10.1109/10.914797 [doi]
PST - ppublish
SO  - IEEE Trans Biomed Eng. 2001 Mar;48(3):340-4. doi: 10.1109/10.914797.