PMID- 12075347
OWN - NLM
STAT- PubMed-not-MEDLINE
DCOM- 20020718
LR  - 20220309
IS  - 0028-0836 (Print)
IS  - 0028-0836 (Linking)
VI  - 417
IP  - 6891
DP  - 2002 Jun 20
TI  - Ultrafast and direct imprint of nanostructures in silicon.
PG  - 835-7
AB  - The fabrication of micrometre- and nanometre-scale devices in silicon typically 
      involves lithography and etching. These processes are costly and tend to be 
      either limited in their resolution or slow in their throughput. Recent work has 
      demonstrated the possibility of patterning substrates on the nanometre scale by 
      'imprinting' or directed self-assembly, although an etching step is still 
      required to generate the final structures. We have devised and here demonstrate a 
      rapid technique for patterning nanostructures in silicon that does not require 
      etching. In our technique which -- we call 'laser-assisted direct imprint' (LADI) 
      -- a single excimer laser pulse melts a thin surface layer of silicon, and a 
      mould is embossed into the resulting liquid layer. A variety of structures with 
      resolution better than 10 nm have been imprinted into silicon using LADI, and the 
      embossing time is less than 250 ns. The high resolution and speed of LADI, which 
      we attribute to molten silicon's low viscosity (one-third that of water), could 
      open up a variety of applications and be extended to other materials and 
      processing techniques.
FAU - Chou, Stephen Y
AU  - Chou SY
AD  - NanoStructure Laboratory, Department of Electrical Engineering, Princeton 
      University, Princeton, New Jersey 08544, USA. chou@ee.princeton.edu
FAU - Keimel, Chris
AU  - Keimel C
FAU - Gu, Jian
AU  - Gu J
LA  - eng
PT  - Journal Article
PL  - England
TA  - Nature
JT  - Nature
JID - 0410462
EDAT- 2002/06/21 10:00
MHDA- 2002/06/21 10:01
CRDT- 2002/06/21 10:00
PHST- 2002/06/21 10:00 [pubmed]
PHST- 2002/06/21 10:01 [medline]
PHST- 2002/06/21 10:00 [entrez]
AID - nature00792 [pii]
AID - 10.1038/nature00792 [doi]
PST - ppublish
SO  - Nature. 2002 Jun 20;417(6891):835-7. doi: 10.1038/nature00792.