PMID- 17517515
OWN - NLM
STAT- PubMed-not-MEDLINE
DCOM- 20080605
LR  - 20080229
IS  - 0968-4328 (Print)
IS  - 0968-4328 (Linking)
VI  - 39
IP  - 3
DP  - 2008
TI  - Macro and microsurface morphology reconstructions during laser-induced etching of 
      silicon.
PG  - 287-93
AB  - Surface morphologies of the laser-etched silicon were studied as a function of 
      the laser power densities. Scanning electron microscope (SEM) results show that 
      different kind of microstructures develop. Pores like structures are formed at 
      low laser power density and pillar like structures are obtained at higher laser 
      power density. It is the etching rate, which is responsible for the surface 
      morphology reconstructions. Etching rate was found to be a function of the laser 
      power density. Atomic force microscope (AFM) results reveal that macro and 
      microsurface morphology reconstructions take place simultaneously as a result of 
      increasing etching rate. Macrosurface morphology reconstruction takes place on 
      the silicon wafer surface and the microsurface morphology reconstruction takes 
      place inside the pore wall.
FAU - Kumar, Rajesh
AU  - Kumar R
AD  - Department of Physics, Indian Institute of Technology Delhi, Hauz Khas, New Delhi 
      110016, India.
FAU - Mavi, H S
AU  - Mavi HS
FAU - Shukla, A K
AU  - Shukla AK
LA  - eng
PT  - Journal Article
DEP - 20070420
PL  - England
TA  - Micron
JT  - Micron (Oxford, England : 1993)
JID - 9312850
EDAT- 2007/05/23 09:00
MHDA- 2007/05/23 09:01
CRDT- 2007/05/23 09:00
PHST- 2007/02/25 00:00 [received]
PHST- 2007/04/12 00:00 [revised]
PHST- 2007/04/12 00:00 [accepted]
PHST- 2007/05/23 09:00 [pubmed]
PHST- 2007/05/23 09:01 [medline]
PHST- 2007/05/23 09:00 [entrez]
AID - S0968-4328(07)00075-3 [pii]
AID - 10.1016/j.micron.2007.04.005 [doi]
PST - ppublish
SO  - Micron. 2008;39(3):287-93. doi: 10.1016/j.micron.2007.04.005. Epub 2007 Apr 20.