PMID- 18276147
OWN - NLM
STAT- PubMed-not-MEDLINE
DCOM- 20090312
LR  - 20090101
IS  - 0968-4328 (Print)
IS  - 0968-4328 (Linking)
VI  - 40
IP  - 1
DP  - 2009 Jan
TI  - Influence of oxygen partial pressure on the composition and orientation of 
      strontium-doped lead zirconate titanate thin films.
PG  - 104-8
LID - 10.1016/j.micron.2007.12.009 [doi]
AB  - The influence of oxygen partial pressure during the deposition of piezoelectric 
      strontium-doped lead zirconate titanate thin films is reported. The thin films 
      have been deposited by RF magnetron sputtering in an atmosphere of high purity 
      argon and oxygen (in the ratio of 9:1), on platinum-coated silicon substrates 
      (heated to 650 degrees C). The influence of oxygen partial pressure is studied to 
      understand the manner in which the stoichiometry of the thin films is modified, 
      and to understand the influence of stoichiometry on the perovskite orientation. 
      This article reports on the results obtained from films deposited at oxygen 
      partial pressures of 1-5 mTorr. The thin films have been studied using a 
      combination of X-ray photoelectron spectroscopy (XPS), glancing angle X-ray 
      diffraction (GA-XRD), and atomic force microscopy (AFM). XPS analysis highlights 
      the marked influence of variations in oxygen pressure during sputtering, observed 
      by variations in oxygen concentration in the thin films, and in some cases by the 
      undesirable decrease in lead concentration in the thin films. GA-XRD is used to 
      study the relative variations in perovskite peak intensities, and has been used 
      to determine the deposition conditions to attain the optimal combination of 
      stoichiometry and orientation. AFM scans show the marked influence of the oxygen 
      partial pressure on the film morphology.
FAU - Sriram, S
AU  - Sriram S
AD  - Microelectronics and Materials Technology Centre, School of Electrical and 
      Computer Engineering, RMIT University, GPO Box 2476V, Melbourne, Victoria 3001, 
      Australia. sharath.sriram@gmail.com
FAU - Bhaskaran, M
AU  - Bhaskaran M
FAU - du Plessis, J
AU  - du Plessis J
FAU - Short, K T
AU  - Short KT
FAU - Sivan, V P
AU  - Sivan VP
FAU - Holland, A S
AU  - Holland AS
LA  - eng
PT  - Journal Article
PT  - Research Support, Non-U.S. Gov't
DEP - 20080106
PL  - England
TA  - Micron
JT  - Micron (Oxford, England : 1993)
JID - 9312850
EDAT- 2008/02/16 09:00
MHDA- 2008/02/16 09:01
CRDT- 2008/02/16 09:00
PHST- 2007/10/13 00:00 [received]
PHST- 2007/12/18 00:00 [revised]
PHST- 2007/12/21 00:00 [accepted]
PHST- 2008/02/16 09:00 [pubmed]
PHST- 2008/02/16 09:01 [medline]
PHST- 2008/02/16 09:00 [entrez]
AID - S0968-4328(08)00005-X [pii]
AID - 10.1016/j.micron.2007.12.009 [doi]
PST - ppublish
SO  - Micron. 2009 Jan;40(1):104-8. doi: 10.1016/j.micron.2007.12.009. Epub 2008 Jan 6.