PMID- 19636094 OWN - NLM STAT- PubMed-not-MEDLINE DCOM- 20091013 LR - 20090731 IS - 1361-6528 (Electronic) IS - 0957-4484 (Linking) VI - 20 IP - 33 DP - 2009 Aug 19 TI - Attofarad resolution capacitance-voltage measurement of nanometer scale field effect transistors utilizing ambient noise. PG - 335203 LID - 10.1088/0957-4484/20/33/335203 [doi] AB - A high resolution capacitance-voltage (C-V) characterization technique, enabling direct measurement of electronic properties at the nanoscale in devices such as nanowire field effect transistors (FETs) through the use of random fluctuations, is described. The minimum noise level required for achieving sub-aF (10(-18) F) resolution, the leveraging of stochastic resonance, and the effect of higher levels of noise are illustrated through simulations. The non-linear DeltaC(gate-source/drain)-V(gate) response of FETs is utilized to determine the inversion layer capacitance (C(inv)) and carrier mobility. The technique is demonstrated by extracting the carrier concentration and effective electron mobility in a nanoscale Si FET with C(inv) = 60 aF. FAU - Gokirmak, Ali AU - Gokirmak A AD - Department of Electrical and Computer Engineering, University of Connecticut, Storrs, CT 06269, USA. gokirmak@engr.uconn.edu FAU - Inaltekin, Hazer AU - Inaltekin H FAU - Tiwari, Sandip AU - Tiwari S LA - eng PT - Journal Article PT - Research Support, U.S. Gov't, Non-P.H.S. DEP - 20090728 PL - England TA - Nanotechnology JT - Nanotechnology JID - 101241272 EDAT- 2009/07/29 09:00 MHDA- 2009/07/29 09:01 CRDT- 2009/07/29 09:00 PHST- 2009/07/29 09:00 [entrez] PHST- 2009/07/29 09:00 [pubmed] PHST- 2009/07/29 09:01 [medline] AID - S0957-4484(09)14538-5 [pii] AID - 10.1088/0957-4484/20/33/335203 [doi] PST - ppublish SO - Nanotechnology. 2009 Aug 19;20(33):335203. doi: 10.1088/0957-4484/20/33/335203. Epub 2009 Jul 28.