PMID- 19908779
OWN - NLM
STAT- PubMed-not-MEDLINE
DCOM- 20091211
LR  - 20190715
IS  - 1533-4880 (Print)
IS  - 1533-4880 (Linking)
VI  - 9
IP  - 12
DP  - 2009 Dec
TI  - Manufacturing of size controlled a-Si:H nanoparticles in plasma using pulsed 
      hydrogen gas.
PG  - 7314-7
AB  - We synthesized size controlled a-Si:H nanoparticles in plasma using a hydrogen 
      gas pulse. An inductively-coupled plasma chamber with RF power (13.56 MHz) was 
      designed for this study. Experiments were performed with various hydrogen pulse 
      ON-times ranging between 0.1 to 0.9 seconds for 1 second periods. The size of the 
      synthesized nanoparticles was measured and analyzed using electron microscopy, 
      Scanning Mobility Particle Sizer (SMPS) and Image J software. We observed that 
      the size of a-Si:H nanoparticles decreased when the hydrogen pulse ON-time was 
      increased. The a-Si:H nanoparticles were found to be spherical in shape and 
      uniform. For hydrogen pulse ON-time greater than 0.3 second, we observed 
      agglomerated particles due to an increase in their concentration. We hope that 
      these particles can be used as an alternative anode material for lithium ion 
      secondary batteries.
FAU - Kim, Kwangsu
AU  - Kim K
AD  - SKKU Advanced Institute of Nano Technology, Sungkyunkwan University, Suwon 
      440-746, Korea.
FAU - Park, Jinhwan
AU  - Park J
FAU - Doo, Seokgwang
AU  - Doo S
FAU - Nam, Jaedo
AU  - Nam J
FAU - Kim, Taesung
AU  - Kim T
LA  - eng
PT  - Journal Article
PT  - Research Support, Non-U.S. Gov't
PL  - United States
TA  - J Nanosci Nanotechnol
JT  - Journal of nanoscience and nanotechnology
JID - 101088195
EDAT- 2009/11/17 06:00
MHDA- 2009/11/17 06:01
CRDT- 2009/11/14 06:00
PHST- 2009/11/14 06:00 [entrez]
PHST- 2009/11/17 06:00 [pubmed]
PHST- 2009/11/17 06:01 [medline]
AID - 10.1166/jnn.2009.1751 [doi]
PST - ppublish
SO  - J Nanosci Nanotechnol. 2009 Dec;9(12):7314-7. doi: 10.1166/jnn.2009.1751.