PMID- 20355371
OWN - NLM
STAT- MEDLINE
DCOM- 20100503
LR  - 20191210
IS  - 1533-4880 (Print)
IS  - 1533-4880 (Linking)
VI  - 10
IP  - 6
DP  - 2010 Jun
TI  - Fabrication process of carbon nanotube field effect transistors using atomic 
      layer deposition passivation for biosensors.
PG  - 3805-9
AB  - Fabrication process of the carbon nanotube (CNT) field effect transistors (FETs) 
      for biosensors was studied. Atomic layer deposition (ALD) of HfO2 was applied to 
      the deposition of the passivation/gate insulator film. The CNT-FETs did not show 
      the drain current degradation after ALD passivation even though the passivation 
      by Si3N4 deposited by plasma-enhanced chemical vapor deposition (PECVD) resulted 
      in a significant drain current decrease. This indicates the advantage of the 
      present ALD technique in terms of the damage suppression. The biosensing 
      operation was confirmed using thus fabricated CNT-FETs.
FAU - Nakashima, Yasuhiro
AU  - Nakashima Y
AD  - Department of Quantum Engineering, Nagoya University, Furo-cho, Chikusaku, Nagoya 
      464-8603, Japan.
FAU - Ohno, Yutaka
AU  - Ohno Y
FAU - Kishimoto, Shigeru
AU  - Kishimoto S
FAU - Okochi, Mina
AU  - Okochi M
FAU - Honda, Hiroyuki
AU  - Honda H
FAU - Mizutani, Takashi
AU  - Mizutani T
LA  - eng
PT  - Evaluation Study
PT  - Journal Article
PT  - Research Support, Non-U.S. Gov't
PL  - United States
TA  - J Nanosci Nanotechnol
JT  - Journal of nanoscience and nanotechnology
JID - 101088195
RN  - 0 (Macromolecular Substances)
RN  - 0 (Nanotubes, Carbon)
SB  - IM
MH  - Biosensing Techniques/*instrumentation
MH  - Crystallization/methods
MH  - Equipment Design
MH  - Equipment Failure Analysis
MH  - Macromolecular Substances/chemistry
MH  - Materials Testing
MH  - Molecular Conformation
MH  - Nanotechnology/methods
MH  - Nanotubes, Carbon/*chemistry/*ultrastructure
MH  - Particle Size
MH  - Surface Properties
MH  - *Transistors, Electronic
EDAT- 2010/04/02 06:00
MHDA- 2010/05/04 06:00
CRDT- 2010/04/02 06:00
PHST- 2010/04/02 06:00 [entrez]
PHST- 2010/04/02 06:00 [pubmed]
PHST- 2010/05/04 06:00 [medline]
AID - 10.1166/jnn.2010.1983 [doi]
PST - ppublish
SO  - J Nanosci Nanotechnol. 2010 Jun;10(6):3805-9. doi: 10.1166/jnn.2010.1983.