PMID- 21411916 OWN - NLM STAT- PubMed-not-MEDLINE DCOM- 20110718 LR - 20110317 IS - 1361-6528 (Electronic) IS - 0957-4484 (Linking) VI - 22 IP - 17 DP - 2011 Apr 29 TI - Fabrication and buckling dynamics of nanoneedle AFM probes. PG - 175303 LID - 10.1088/0957-4484/22/17/175303 [doi] AB - A new method for the fabrication of high-aspect-ratio probes by electron beam induced deposition is described. This technique allows the fabrication of cylindrical 'nanoneedle' structures on the atomic force microscope (AFM) probe tip which can be used for accurate imaging of surfaces with high steep features. Scanning electron microscope (SEM) imaging showed that needles with diameters in the range of 18-100 nm could be obtained by this technique. The needles were shown to undergo buckling deformation under large tip-sample forces. The deformation was observed to recover elastically under vertical deformations of up to approximately 60% of the needle length, preventing damage to the needle. A technique of stabilizing the needle against buckling by coating it with additional electron beam deposited carbon was also investigated; it was shown that coated needles of 75 nm or greater total diameter did not buckle even under tip-sample forces of approximately 1.5 microN. FAU - Beard, J D AU - Beard JD AD - Department of Physics, University of Bath, Claverton Down, Bath BA2 7AY, UK. FAU - Gordeev, S N AU - Gordeev SN LA - eng PT - Journal Article DEP - 20110316 PL - England TA - Nanotechnology JT - Nanotechnology JID - 101241272 EDAT- 2011/03/18 06:00 MHDA- 2011/03/18 06:01 CRDT- 2011/03/18 06:00 PHST- 2011/03/18 06:00 [entrez] PHST- 2011/03/18 06:00 [pubmed] PHST- 2011/03/18 06:01 [medline] AID - S0957-4484(11)76453-4 [pii] AID - 10.1088/0957-4484/22/17/175303 [doi] PST - ppublish SO - Nanotechnology. 2011 Apr 29;22(17):175303. doi: 10.1088/0957-4484/22/17/175303. Epub 2011 Mar 16.