PMID- 21730511 OWN - NLM STAT- PubMed-not-MEDLINE DCOM- 20121002 LR - 20110706 IS - 0957-4484 (Print) IS - 0957-4484 (Linking) VI - 18 IP - 7 DP - 2007 Feb 21 TI - Batch fabrication of carbon nanotube bearings. PG - 075703 LID - 10.1088/0957-4484/18/7/075703 [doi] AB - Relative displacements between the atomically smooth, nested shells in multiwalled carbon nanotubes (MWNTs) can be used as a robust nanoscale motion enabling mechanism. Here, we report on a novel method suited for structuring large arrays of MWNTs into such nanobearings in a parallel fashion. By creating MWNT nanostructures with nearly identical electrical circuit resistance and heat transport conditions, uniform Joule heating across the array is used to simultaneously engineer the shell geometry via electric breakdown. The biasing approach used optimizes process metrics such as yield and cycle-time. We also present the parallel and piecewise shell engineering at different segments of a single nanotube to construct multiple, but independent, high density bearings. We anticipate this method for constructing electromechanical building blocks to be a fundamental unit process for manufacturing future nanoelectromechanical systems (NEMS) with sophisticated architectures and to drive several nanoscale transduction applications such as GHz-oscillators, shuttles, memories, syringes and actuators. FAU - Subramanian, A AU - Subramanian A AD - Institute of Robotics and Intelligent Systems, ETH Zurich, 8092 Zurich, Switzerland. FAU - Dong, L X AU - Dong LX FAU - Tharian, J AU - Tharian J FAU - Sennhauser, U AU - Sennhauser U FAU - Nelson, B J AU - Nelson BJ LA - eng PT - Journal Article DEP - 20070112 PL - England TA - Nanotechnology JT - Nanotechnology JID - 101241272 EDAT- 2007/02/21 00:00 MHDA- 2007/02/21 00:01 CRDT- 2011/07/07 06:00 PHST- 2011/07/07 06:00 [entrez] PHST- 2007/02/21 00:00 [pubmed] PHST- 2007/02/21 00:01 [medline] AID - S0957-4484(07)36066-2 [pii] AID - 10.1088/0957-4484/18/7/075703 [doi] PST - ppublish SO - Nanotechnology. 2007 Feb 21;18(7):075703. doi: 10.1088/0957-4484/18/7/075703. Epub 2007 Jan 12.