PMID- 22089984
OWN - NLM
STAT- MEDLINE
DCOM- 20120405
LR  - 20211021
IS  - 1473-0189 (Electronic)
IS  - 1473-0197 (Print)
IS  - 1473-0189 (Linking)
VI  - 12
IP  - 2
DP  - 2012 Jan 21
TI  - Photolithographic surface micromachining of polydimethylsiloxane (PDMS).
PG  - 391-5
LID - 10.1039/c1lc20721k [doi]
AB  - A major technical hurdle in microfluidics is the difficulty in achieving high 
      fidelity lithographic patterning on polydimethylsiloxane (PDMS). Here, we report 
      a simple yet highly precise and repeatable PDMS surface micromachining method 
      using direct photolithography followed by reactive ion etching (RIE). Our method 
      to achieve surface patterning of PDMS applied an O(2) plasma treatment to PDMS to 
      activate its surface to overcome the challenge of poor photoresist adhesion on 
      PDMS for photolithography. Our photolithographic PDMS surface micromachining 
      technique is compatible with conventional soft lithography techniques and other 
      silicon-based surface and bulk micromachining methods. To illustrate the general 
      application of our method, we demonstrated fabrication of large microfiltration 
      membranes and free-standing beam structures in PDMS.
FAU - Chen, Weiqiang
AU  - Chen W
AD  - Department of Mechanical Engineering, University of Michigan, Ann Arbor, Michigan 
      48109, USA.
FAU - Lam, Raymond H W
AU  - Lam RH
FAU - Fu, Jianping
AU  - Fu J
LA  - eng
GR  - UL1 RR024986/RR/NCRR NIH HHS/United States
PT  - Journal Article
PT  - Research Support, Non-U.S. Gov't
PT  - Research Support, U.S. Gov't, Non-P.H.S.
DEP - 20111117
PL  - England
TA  - Lab Chip
JT  - Lab on a chip
JID - 101128948
RN  - 0 (Dimethylpolysiloxanes)
RN  - 63148-62-9 (baysilon)
RN  - S88TT14065 (Oxygen)
SB  - IM
MH  - Dimethylpolysiloxanes/*chemistry
MH  - Microfluidics/instrumentation
MH  - Microtechnology/*instrumentation
MH  - Oxygen/chemistry
MH  - Surface Properties
PMC - PMC4120064
MID - NIHMS608788
EDAT- 2011/11/18 06:00
MHDA- 2012/04/06 06:00
PMCR- 2014/08/04
CRDT- 2011/11/18 06:00
PHST- 2011/11/18 06:00 [entrez]
PHST- 2011/11/18 06:00 [pubmed]
PHST- 2012/04/06 06:00 [medline]
PHST- 2014/08/04 00:00 [pmc-release]
AID - 10.1039/c1lc20721k [doi]
PST - ppublish
SO  - Lab Chip. 2012 Jan 21;12(2):391-5. doi: 10.1039/c1lc20721k. Epub 2011 Nov 17.