PMID- 22164040
OWN - NLM
STAT- MEDLINE
DCOM- 20120628
LR  - 20211021
IS  - 1424-8220 (Electronic)
IS  - 1424-8220 (Linking)
VI  - 11
IP  - 8
DP  - 2011
TI  - FPGA-based smart sensor for online displacement measurements using a heterodyne 
      interferometer.
PG  - 7710-23
LID - 10.3390/s110807710 [doi]
AB  - The measurement of small displacements on the nanometric scale demands 
      metrological systems of high accuracy and precision. In this context, 
      interferometer-based displacement measurements have become the main tools used 
      for traceable dimensional metrology. The different industrial applications in 
      which small displacement measurements are employed requires the use of online 
      measurements, high speed processes, open architecture control systems, as well as 
      good adaptability to specific process conditions. The main contribution of this 
      work is the development of a smart sensor for large displacement measurement 
      based on phase measurement which achieves high accuracy and resolution, designed 
      to be used with a commercial heterodyne interferometer. The system is based on a 
      low-cost Field Programmable Gate Array (FPGA) allowing the integration of several 
      functions in a single portable device. This system is optimal for high speed 
      applications where online measurement is needed and the reconfigurability feature 
      allows the addition of different modules for error compensation, as might be 
      required by a specific application.
FAU - Vera-Salas, Luis Alberto
AU  - Vera-Salas LA
AD  - HSPdigital, CA Procesamiento Digital de Senales, CA Telematica, DICIS, 
      Universidad de Guanajuato, Carr Salamanca-Valle km 3.5+1.8, Palo Blanco, 36885 
      Salamanca, Gto, Mexico. lavera@hspdigital.org.
FAU - Moreno-Tapia, Sandra Veronica
AU  - Moreno-Tapia SV
FAU - Garcia-Perez, Arturo
AU  - Garcia-Perez A
FAU - de Jesus Romero-Troncoso, Rene
AU  - de Jesus Romero-Troncoso R
FAU - Osornio-Rios, Roque Alfredo
AU  - Osornio-Rios RA
FAU - Serroukh, Ibrahim
AU  - Serroukh I
FAU - Cabal-Yepez, Eduardo
AU  - Cabal-Yepez E
LA  - eng
PT  - Journal Article
PT  - Research Support, Non-U.S. Gov't
DEP - 20110805
PL  - Switzerland
TA  - Sensors (Basel)
JT  - Sensors (Basel, Switzerland)
JID - 101204366
SB  - IM
MH  - Algorithms
MH  - Biosensing Techniques/*methods
MH  - Computers
MH  - Image Processing, Computer-Assisted
MH  - Interferometry/*methods
MH  - Internet
MH  - Models, Statistical
MH  - *Motion
MH  - Optics and Photonics
MH  - Reproducibility of Results
MH  - Software
PMC - PMC3231721
OTO - NOTNLM
OT  - FPGA
OT  - heterodyne interferometer
OT  - phase measurement
OT  - smart sensor
EDAT- 2011/12/14 06:00
MHDA- 2012/06/29 06:00
PMCR- 2011/01/01
CRDT- 2011/12/14 06:00
PHST- 2011/06/10 00:00 [received]
PHST- 2011/08/02 00:00 [revised]
PHST- 2011/08/04 00:00 [accepted]
PHST- 2011/12/14 06:00 [entrez]
PHST- 2011/12/14 06:00 [pubmed]
PHST- 2012/06/29 06:00 [medline]
PHST- 2011/01/01 00:00 [pmc-release]
AID - s110807710 [pii]
AID - sensors-11-07710 [pii]
AID - 10.3390/s110807710 [doi]
PST - ppublish
SO  - Sensors (Basel). 2011;11(8):7710-23. doi: 10.3390/s110807710. Epub 2011 Aug 5.