PMID- 22817278 OWN - NLM STAT- PubMed-not-MEDLINE DCOM- 20121113 LR - 20130304 IS - 1944-8252 (Electronic) IS - 1944-8244 (Linking) VI - 4 IP - 8 DP - 2012 Aug TI - Field-effect transistors based on silicon nanowire arrays: effect of the good and the bad silicon nanowires. PG - 4251-8 LID - 10.1021/am300961d [doi] AB - Aligned arrays of silicon nanowires (aa-Si NWs) allow the exploitation of Si NWs in a scalable way. Previous studies explored the influence of the Si NWs' number, doping density, and diameter on the related electrical performance. Nevertheless, the origin of the observed effects still not fully understood. Here, we aim to provide an understanding on the effect of channel number on the fundamental parameters of aa-Si NW field effect transistors (FETs). Toward this end, we have fabricated and characterized 87 FET devices with varied number of Si NWs, which were grown by chemical vapor deposition with gold catalyst. The results show that FETs with Si NWs above a threshold number (n > 80) exhibit better device uniformity, but generally lower device performance, than FETs with lower number of Si NWs (3