PMID- 23033084
OWN - NLM
STAT- PubMed-not-MEDLINE
DCOM- 20130122
LR  - 20181023
IS  - 1539-4522 (Electronic)
IS  - 1559-128X (Linking)
VI  - 51
IP  - 28
DP  - 2012 Oct 1
TI  - Multiwavelength-integrated local model fitting method for interferometric surface 
      profiling.
PG  - 6700-7
LID - 10.1364/AO.51.006700 [doi]
AB  - The local model fitting (LMF) method is a useful single-shot surface profiling 
      algorithm that features fast measurement speed and robustness against vibration. 
      However, the measurement range of the LMF method (i.e., measurable height 
      difference between two neighboring pixels) is limited up to a quarter of the 
      light source wavelength. To cope with this problem, the multiwavelength-matched 
      LMF(MM-LMF) method was proposed, where the plain LMF method is first applied 
      individually to interference images obtained from multiple light sources with 
      different wavelengths, and then the LMF solutions are matched to obtain a 
      range-extended solution. Although the MM-LMF method was shown to provide high 
      measurement accuracy under moderate noise, phase unwrapping errors can occur if 
      individual LMF solutions are erroneous. In this paper, we propose the 
      multiwavelength-integrated LMF (MI-LMF) method, which directly computes a 
      range-extended solution from multiple interference images in an integrated way. 
      The effectiveness of the proposed MI-LMF method is demonstrated through 
      simulations and actual experiments.
FAU - Yamashita, Akihiro
AU  - Yamashita A
AD  - Tokyo Institute of Technology, 2-12-1 O-okayama, Tokyo 152-8552, Japan. 
      yamashita@sg.cs.titech.ac.jp
FAU - Sugiyama, Masashi
AU  - Sugiyama M
FAU - Kitagawa, Katsuichi
AU  - Kitagawa K
FAU - Kobayashi, Hisashi
AU  - Kobayashi H
LA  - eng
PT  - Journal Article
PL  - United States
TA  - Appl Opt
JT  - Applied optics
JID - 0247660
EDAT- 2012/10/04 06:00
MHDA- 2012/10/04 06:01
CRDT- 2012/10/04 06:00
PHST- 2012/10/04 06:00 [entrez]
PHST- 2012/10/04 06:00 [pubmed]
PHST- 2012/10/04 06:01 [medline]
AID - 242423 [pii]
AID - 10.1364/AO.51.006700 [doi]
PST - ppublish
SO  - Appl Opt. 2012 Oct 1;51(28):6700-7. doi: 10.1364/AO.51.006700.