PMID- 23493122 OWN - NLM STAT- MEDLINE DCOM- 20131231 LR - 20211021 IS - 1424-8220 (Electronic) IS - 1424-8220 (Linking) VI - 13 IP - 3 DP - 2013 Mar 14 TI - A novel offset cancellation based on parasitic-insensitive switched-capacitor sensing circuit for the out-of-plane single-Gimbaled decoupled CMOS-MEMS gyroscope. PG - 3568-87 LID - 10.3390/s130303568 [doi] AB - This paper presents a novel parasitic-insensitive switched-capacitor (PISC) sensing circuit design in order to obtain high sensitivity and ultra linearity and reduce the parasitic effect for the out-of-plane single-gimbaled decoupled CMOS-MEMS gyroscope (SGDG). According to the simulation results, the proposed PISC circuit has better sensitivity and high linearity in a wide dynamic range. Experimental results also show a better performance. In addition, the PISC circuit can use signal processing to cancel the offset and noise. Thus, this circuit is very suitable for gyroscope measurement. FAU - Chang, Ming-Hui AU - Chang MH AD - Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan. d93522037@ntu.edu.tw FAU - Huang, Han-Pang AU - Huang HP LA - eng PT - Journal Article PT - Research Support, Non-U.S. Gov't DEP - 20130314 PL - Switzerland TA - Sensors (Basel) JT - Sensors (Basel, Switzerland) JID - 101204366 SB - IM MH - Equipment Design MH - *Micro-Electrical-Mechanical Systems MH - *Semiconductors PMC - PMC3658762 EDAT- 2013/03/16 06:00 MHDA- 2014/01/01 06:00 PMCR- 2013/03/01 CRDT- 2013/03/16 06:00 PHST- 2013/02/26 00:00 [received] PHST- 2013/03/08 00:00 [revised] PHST- 2013/03/11 00:00 [accepted] PHST- 2013/03/16 06:00 [entrez] PHST- 2013/03/16 06:00 [pubmed] PHST- 2014/01/01 06:00 [medline] PHST- 2013/03/01 00:00 [pmc-release] AID - s130303568 [pii] AID - sensors-13-03568 [pii] AID - 10.3390/s130303568 [doi] PST - epublish SO - Sensors (Basel). 2013 Mar 14;13(3):3568-87. doi: 10.3390/s130303568.