PMID- 23759854
OWN - NLM
STAT- PubMed-not-MEDLINE
DCOM- 20131203
LR  - 20181023
IS  - 1539-4522 (Electronic)
IS  - 1559-128X (Linking)
VI  - 52
IP  - 17
DP  - 2013 Jun 10
TI  - Improved algorithm for multiwavelength single-shot interferometric surface 
      profiling: speeding up the multiwavelength-integrated local model fitting method 
      by local information sharing.
PG  - 4042-53
LID - 10.1364/AO.52.004042 [doi]
AB  - The local model fitting (LMF) method is a single-shot interferometric surface 
      profiling algorithm that possesses nondestructive, fast, accurate, and robust 
      measurement capabilities. To extend the measurement range of LMF, extensions 
      based on multiwavelength light sources such as the multiwavelength-matched LMF 
      (MM-LMF) method and the multiwavelength-integrated LMF (MI-LMF) method were 
      proposed recently. MM-LMF is computationally efficient but it tends to suffer 
      from phase unwrapping errors, whereas MI-LMF tends to be accurate but it is 
      computationally expensive. In this paper, we improve the computational efficiency 
      of MI-LMF by combining it with MM-LMF via local information sharing. Through 
      actual experiments, we demonstrate that the proposed method is approximately 10 
      times faster than the original MI-LMF method, with measurement accuracy kept 
      comparable.
FAU - Nakata, Keisuke
AU  - Nakata K
AD  - Tokyo Institute of Technology, Tokyo, Japan. nakata@sg.cs.titech.ac.jp
FAU - Sugiyama, Masashi
AU  - Sugiyama M
FAU - Kitagawa, Katsuichi
AU  - Kitagawa K
FAU - Otsuki, Masafumi
AU  - Otsuki M
LA  - eng
PT  - Journal Article
PL  - United States
TA  - Appl Opt
JT  - Applied optics
JID - 0247660
EDAT- 2013/06/14 06:00
MHDA- 2013/06/14 06:01
CRDT- 2013/06/14 06:00
PHST- 2013/06/14 06:00 [entrez]
PHST- 2013/06/14 06:00 [pubmed]
PHST- 2013/06/14 06:01 [medline]
AID - 256471 [pii]
AID - 10.1364/AO.52.004042 [doi]
PST - ppublish
SO  - Appl Opt. 2013 Jun 10;52(17):4042-53. doi: 10.1364/AO.52.004042.