PMID- 23929222
OWN - NLM
STAT- MEDLINE
DCOM- 20131209
LR  - 20211021
IS  - 1940-087X (Electronic)
IS  - 1940-087X (Linking)
IP  - 77
DP  - 2013 Jul 30
TI  - Scanning-probe single-electron capacitance spectroscopy.
LID - 10.3791/50676 [doi]
LID - 50676
AB  - The integration of low-temperature scanning-probe techniques and single-electron 
      capacitance spectroscopy represents a powerful tool to study the electronic 
      quantum structure of small systems - including individual atomic dopants in 
      semiconductors. Here we present a capacitance-based method, known as Subsurface 
      Charge Accumulation (SCA) imaging, which is capable of resolving single-electron 
      charging while achieving sufficient spatial resolution to image individual atomic 
      dopants. The use of a capacitance technique enables observation of subsurface 
      features, such as dopants buried many nanometers beneath the surface of a 
      semiconductor material(1,2,3). In principle, this technique can be applied to any 
      system to resolve electron motion below an insulating surface. As in other 
      electric-field-sensitive scanned-probe techniques(4), the lateral spatial 
      resolution of the measurement depends in part on the radius of curvature of the 
      probe tip. Using tips with a small radius of curvature can enable spatial 
      resolution of a few tens of nanometers. This fine spatial resolution allows 
      investigations of small numbers (down to one) of subsurface dopants(1,2). The 
      charge resolution depends greatly on the sensitivity of the charge detection 
      circuitry; using high electron mobility transistors (HEMT) in such circuits at 
      cryogenic temperatures enables a sensitivity of approximately 0.01 
      electrons/Hz((1/2)) at 0.3 K(5).
FAU - Walsh, Kathleen A
AU  - Walsh KA
AD  - Department of Physics and Astronomy, Michigan State University.
FAU - Romanowich, Megan E
AU  - Romanowich ME
FAU - Gasseller, Morewell
AU  - Gasseller M
FAU - Kuljanishvili, Irma
AU  - Kuljanishvili I
FAU - Ashoori, Raymond
AU  - Ashoori R
FAU - Tessmer, Stuart
AU  - Tessmer S
LA  - eng
PT  - Journal Article
PT  - Research Support, Non-U.S. Gov't
PT  - Research Support, U.S. Gov't, Non-P.H.S.
PT  - Video-Audio Media
DEP - 20130730
PL  - United States
TA  - J Vis Exp
JT  - Journal of visualized experiments : JoVE
JID - 101313252
SB  - IM
MH  - Cold Temperature
MH  - Electric Capacitance
MH  - Electrons
MH  - Microscopy, Scanning Probe/*instrumentation/*methods
PMC - PMC3846585
EDAT- 2013/08/10 06:00
MHDA- 2013/12/16 06:00
PMCR- 2015/07/30
CRDT- 2013/08/10 06:00
PHST- 2013/08/10 06:00 [entrez]
PHST- 2013/08/10 06:00 [pubmed]
PHST- 2013/12/16 06:00 [medline]
PHST- 2015/07/30 00:00 [pmc-release]
AID - 50676 [pii]
AID - 10.3791/50676 [doi]
PST - epublish
SO  - J Vis Exp. 2013 Jul 30;(77):50676. doi: 10.3791/50676.