PMID- 24104490 OWN - NLM STAT- PubMed-not-MEDLINE DCOM- 20140605 LR - 20181023 IS - 1094-4087 (Electronic) IS - 1094-4087 (Linking) VI - 21 Suppl 4 DP - 2013 Jul 1 TI - Fabrication of resonant patterns using thermal nano-imprint lithography for thin-film photovoltaic applications. PG - A631-41 LID - 10.1364/OE.21.00A631 [doi] AB - A single-step, low-cost fabrication method to generate resonant nano-grating patterns on poly-methyl-methacrylate (PMMA; plexiglas) substrates using thermal nano-imprint lithography is reported. A guided-mode resonant structure is obtained by subsequent deposition of thin films of transparent conductive oxide and amorphous silicon on the imprinted area. Referenced to equivalent planar structures, around 25% and 45% integrated optical absorbance enhancement is observed over the 450-nm to 900-nm wavelength range in one- and two-dimensional patterned samples, respectively. The fabricated elements provided have 300-nm periods. Thermally imprinted thermoplastic substrates hold potential for low-cost fabrication of nano-patterned thin-film solar cells for efficient light management. FAU - Khaleque, Tanzina AU - Khaleque T FAU - Svavarsson, Halldor Gudfinnur AU - Svavarsson HG FAU - Magnusson, Robert AU - Magnusson R LA - eng PT - Journal Article PT - Research Support, Non-U.S. Gov't PL - United States TA - Opt Express JT - Optics express JID - 101137103 EDAT- 2013/10/10 06:00 MHDA- 2013/10/10 06:01 CRDT- 2013/10/10 06:00 PHST- 2013/10/10 06:00 [entrez] PHST- 2013/10/10 06:00 [pubmed] PHST- 2013/10/10 06:01 [medline] AID - 253798 [pii] AID - 10.1364/OE.21.00A631 [doi] PST - ppublish SO - Opt Express. 2013 Jul 1;21 Suppl 4:A631-41. doi: 10.1364/OE.21.00A631.