PMID- 24141361 OWN - NLM STAT- PubMed-not-MEDLINE DCOM- 20140611 LR - 20131022 IS - 1361-6528 (Electronic) IS - 0957-4484 (Linking) VI - 24 IP - 45 DP - 2013 Nov 15 TI - Controlling the electronic properties of SWCNT FETs via modification of the substrate surface prior to atomic layer deposition of 10 nm thick Al2O3 film. PG - 455701 LID - 10.1088/0957-4484/24/45/455701 [doi] AB - We demonstrate the controllability of the electronic transport properties of single-walled carbon nanotube (SWCNT) field effect transistors (FETs) via the use of 10 nm thick atomic-layer-deposited aluminum oxide (Al2O3) gate dielectric films, where the substrate surfaces were modified with differently functionalized self-assembled monolayers (SAMs) prior to their growth, namely SAMs with hydrophobic (-CH3) or hydrophilic (-OH) groups. Al2O3 grown on a hydrophilic surface causes the SWCNT FETs to keep their intrinsic p-type transfer characteristics by alleviating the electron-doping effect originating from defects in the Al2O3 film. However, the SAM with methyl groups increases the defect density of the Al2O3 film, enhancing the n-type transfer characteristics and inducing ambipolar to n-type behavior in the SWCNT FETs. In this work, we find clues about the distribution of charged defects in the Al2O3 film, which strongly influences the transfer characteristics of the SWCNT FETs, by measuring the thickness-dependent flat band voltages. FAU - Kim, Joonsung AU - Kim J AD - Department of Chemical and Biological Engineering, Korea University, Seoul 136-701, Korea. FAU - Yoon, Jangyeol AU - Yoon J FAU - Na, Junhong AU - Na J FAU - Yee, Seongmin AU - Yee S FAU - Kim, Gyu Tae AU - Kim GT FAU - Ha, Jeong Sook AU - Ha JS LA - eng PT - Journal Article PT - Research Support, Non-U.S. Gov't DEP - 20131018 PL - England TA - Nanotechnology JT - Nanotechnology JID - 101241272 EDAT- 2013/10/22 06:00 MHDA- 2013/10/22 06:01 CRDT- 2013/10/22 06:00 PHST- 2013/10/22 06:00 [entrez] PHST- 2013/10/22 06:00 [pubmed] PHST- 2013/10/22 06:01 [medline] AID - 10.1088/0957-4484/24/45/455701 [doi] PST - ppublish SO - Nanotechnology. 2013 Nov 15;24(45):455701. doi: 10.1088/0957-4484/24/45/455701. Epub 2013 Oct 18.