PMID- 24205685
OWN - NLM
STAT- PubMed-not-MEDLINE
DCOM- 20140108
LR  - 20190715
IS  - 1533-4880 (Print)
IS  - 1533-4880 (Linking)
VI  - 13
IP  - 9
DP  - 2013 Sep
TI  - Fabrication of nano-sized magnetic tunnel junctions using lift-off process 
      assisted by atomic force probe tip.
PG  - 6467-70
AB  - We present a fabrication method for nano-scale magnetic tunnel junctions (MTJs), 
      employing e-beam lithography and lift-off process assisted by the probe tip of 
      atomic force microscope (AFM). It is challenging to fabricate nano-sized MTJs on 
      small substrates because it is difficult to use chemical mechanical planarization 
      (CMP) process. The AFM-assisted lift-off process enables us to fabricate 
      nano-sized MTJs on small substrates (12.5 mm x 12.5 mm) without CMP process. The 
      e-beam patterning has been done using bi-layer resist, the poly methyl 
      methacrylate (PMMA)/ hydrogen silsesquioxane (HSQ). The PMMA/HSQ resist patterns 
      are used for both the etch mask for ion milling and the self-aligned mask for top 
      contact formation after passivation. The self-aligned mask buried inside a 
      passivation oxide layer, is readily lifted-off by the force exerted by the probe 
      tip. The nano-MTJs (160 nm x 90 nm) fabricated by this method show clear 
      current-induced magnetization switching with a reasonable TMR and critical 
      switching current density.
FAU - Jung, Ku Youl
AU  - Jung KY
AD  - Center for Spintronics Research, Korea Institute of Science and Technology, Seoul 
      136-791, Korea.
FAU - Min, Byoung-Chul
AU  - Min BC
FAU - Ahn, Chiyui
AU  - Ahn C
FAU - Choi, Gyung-Min
AU  - Choi GM
FAU - Shin, Il-Jae
AU  - Shin IJ
FAU - Park, Seung-Young
AU  - Park SY
FAU - Rhie, Kungwon
AU  - Rhie K
FAU - Shin, Kyung-Ho
AU  - Shin KH
LA  - eng
PT  - Journal Article
PL  - United States
TA  - J Nanosci Nanotechnol
JT  - Journal of nanoscience and nanotechnology
JID - 101088195
EDAT- 2013/11/12 06:00
MHDA- 2013/11/12 06:01
CRDT- 2013/11/12 06:00
PHST- 2013/11/12 06:00 [entrez]
PHST- 2013/11/12 06:00 [pubmed]
PHST- 2013/11/12 06:01 [medline]
AID - 10.1166/jnn.2013.7616 [doi]
PST - ppublish
SO  - J Nanosci Nanotechnol. 2013 Sep;13(9):6467-70. doi: 10.1166/jnn.2013.7616.