PMID- 24977538
OWN - NLM
STAT- PubMed-not-MEDLINE
DCOM- 20150422
LR  - 20181023
IS  - 1094-4087 (Electronic)
IS  - 1094-4087 (Linking)
VI  - 22
IP  - 12
DP  - 2014 Jun 16
TI  - Lens of controllable optical field with thin film metallic glasses for UV-LEDs.
PG  - 14411-24
LID - 10.1364/OE.22.014411 [doi]
AB  - In the exposure process of photolithography, a free-form lens is designed and 
      fabricated for UV-LED (Ultraviolet Light-Emitting Diode). Thin film metallic 
      glasses (TFMG) are adopted as UV reflection layers to enhance the irradiance and 
      uniformity. The Polydimethylsiloxane (PDMS) with high transmittance is used as 
      the lens material. The 3-D fast printing is attempted to make the mold of the 
      lens. The results show that the average irradiance can be enhanced by 6.5~6.7%, 
      and high uniformity of 85~86% can be obtained. Exposure on commercial thick 
      photoresist using this UV-LED system shows 3~5% dimensional deviation, lower than 
      the 6~8% deviation for commercial mercury lamp system. This current system shows 
      promising potential to replace the conventional mercury exposure systems.
FAU - Pan, C T
AU  - Pan CT
FAU - Chen, Y C
AU  - Chen YC
FAU - Lin, Po-Hung
AU  - Lin PH
FAU - Hsieh, C C
AU  - Hsieh CC
FAU - Hsu, F T
AU  - Hsu FT
FAU - Lin, Po-Hsun
AU  - Lin PH
FAU - Chang, C M
AU  - Chang CM
FAU - Hsu, J H
AU  - Hsu JH
FAU - Huang, J C
AU  - Huang JC
LA  - eng
PT  - Journal Article
PT  - Research Support, Non-U.S. Gov't
PL  - United States
TA  - Opt Express
JT  - Optics express
JID - 101137103
EDAT- 2014/07/01 06:00
MHDA- 2014/07/01 06:01
CRDT- 2014/07/01 06:00
PHST- 2014/07/01 06:00 [entrez]
PHST- 2014/07/01 06:00 [pubmed]
PHST- 2014/07/01 06:01 [medline]
AID - 289613 [pii]
AID - 10.1364/OE.22.014411 [doi]
PST - ppublish
SO  - Opt Express. 2014 Jun 16;22(12):14411-24. doi: 10.1364/OE.22.014411.