PMID- 25894937
OWN - NLM
STAT- PubMed-not-MEDLINE
DCOM- 20150603
LR  - 20181113
IS  - 1424-8220 (Electronic)
IS  - 1424-8220 (Linking)
VI  - 15
IP  - 4
DP  - 2015 Apr 16
TI  - Optimization of capacitive acoustic resonant sensor using numerical simulation 
      and design of experiment.
PG  - 8945-67
LID - 10.3390/s150408945 [doi]
AB  - Optimization of the acoustic resonant sensor requires a clear understanding of 
      how the output responses of the sensor are affected by the variation of different 
      factors. During this work, output responses of a capacitive acoustic transducer, 
      such as membrane displacement, quality factor, and capacitance variation, are 
      considered to evaluate the sensor design. The six device parameters taken into 
      consideration are membrane radius, backplate radius, cavity height, air gap, 
      membrane tension, and membrane thickness. The effects of factors on the output 
      responses of the transducer are investigated using an integrated methodology that 
      combines numerical simulation and design of experiments (DOE). A series of 
      numerical experiments are conducted to obtain output responses for different 
      combinations of device parameters using finite element methods (FEM). Response 
      surface method is used to identify the significant factors and to develop the 
      empirical models for the output responses. Finally, these results are utilized to 
      calculate the optimum device parameters using multi-criteria optimization with 
      desirability function. Thereafter, the validating experiments are designed and 
      deployed using the numerical simulation to crosscheck the responses.
FAU - Haque, Rubaiyet Iftekharul
AU  - Haque RI
AD  - Centre Microelectronique de Provence, Ecole des Mines de Saint-Etienne, Gardanne 
      13541, France. haque@emse.fr.
AD  - TAGSYS RFID, 13600 La Ciotat, France. haque@emse.fr.
FAU - Loussert, Christophe
AU  - Loussert C
AD  - TAGSYS RFID, 13600 La Ciotat, France. christophe.loussert@tagsysrfid.com.
FAU - Sergent, Michelle
AU  - Sergent M
AD  - Aix-Marseille Universite, LISA EA 4672, 13397 Marseille Cedex 20, France. 
      michelle.sergent@univ-amu.fr.
FAU - Benaben, Patrick
AU  - Benaben P
AD  - Centre Microelectronique de Provence, Ecole des Mines de Saint-Etienne, Gardanne 
      13541, France. benaben@emse.fr.
FAU - Boddaert, Xavier
AU  - Boddaert X
AD  - Centre Microelectronique de Provence, Ecole des Mines de Saint-Etienne, Gardanne 
      13541, France. boddaert@emse.fr.
LA  - eng
PT  - Journal Article
DEP - 20150416
PL  - Switzerland
TA  - Sensors (Basel)
JT  - Sensors (Basel, Switzerland)
JID - 101204366
PMC - PMC4431226
EDAT- 2015/04/22 06:00
MHDA- 2015/04/22 06:01
PMCR- 2015/04/01
CRDT- 2015/04/21 06:00
PHST- 2015/01/29 00:00 [received]
PHST- 2015/03/27 00:00 [revised]
PHST- 2015/04/09 00:00 [accepted]
PHST- 2015/04/21 06:00 [entrez]
PHST- 2015/04/22 06:00 [pubmed]
PHST- 2015/04/22 06:01 [medline]
PHST- 2015/04/01 00:00 [pmc-release]
AID - s150408945 [pii]
AID - sensors-15-08945 [pii]
AID - 10.3390/s150408945 [doi]
PST - epublish
SO  - Sensors (Basel). 2015 Apr 16;15(4):8945-67. doi: 10.3390/s150408945.