PMID- 25959389
OWN - NLM
STAT- PubMed-not-MEDLINE
DCOM- 20150807
LR  - 20181113
IS  - 2045-2322 (Electronic)
IS  - 2045-2322 (Linking)
VI  - 5
DP  - 2015 May 11
TI  - Stencil nano lithography based on a nanoscale polymer shadow mask: towards 
      organic nanoelectronics.
PG  - 10220
LID - 10.1038/srep10220 [doi]
LID - 10220
AB  - A stencil lithography technique has been developed to fabricate 
      organic-material-based electronic devices with sub-micron resolution. Suspended 
      polymethylmethacrylate (PMMA) membranes were used as shadow masks for defining 
      organic channels and top electrodes. Arrays of pentacene field effect transistors 
      (FETs) with various channel lengths from 50 mum down to 500 nm were successfully 
      produced from the same batch using this technique. Electrical transport 
      measurements showed that the electrical contacts of all devices were stable and 
      the normalized contact resistances were much lower than previously studied 
      organic FETs. Scaling effects, originating from the bulk space charge current, 
      were investigated by analyzing the channel-length-dependent mobility and 
      hysteresis behaviors. This novel lithography method provides a reliable means for 
      studying the fundamental transport properties of organic materials at the 
      nanoscale as well as enabling potential applications requiring the fabrication of 
      integrated organic nanoelectronic devices.
FAU - Yun, Hoyeol
AU  - Yun H
AD  - Division of Quantum Phases and Devices, School of Physics, Konkuk University, 
      143-701, Seoul, Korea.
FAU - Kim, Sangwook
AU  - Kim S
AD  - Department of Chemistry, Konkuk University, 143-701, Seoul, Korea.
FAU - Kim, Hakseong
AU  - Kim H
AD  - Division of Quantum Phases and Devices, School of Physics, Konkuk University, 
      143-701, Seoul, Korea.
FAU - Lee, Junghyun
AU  - Lee J
AD  - Department of Chemistry, Konkuk University, 143-701, Seoul, Korea.
FAU - McAllister, Kirstie
AU  - McAllister K
AD  - Division of Quantum Phases and Devices, School of Physics, Konkuk University, 
      143-701, Seoul, Korea.
FAU - Kim, Junhyung
AU  - Kim J
AD  - Department of Organic and Nano System Engineering, Konkuk University, 143-701, 
      Seoul, Korea.
FAU - Pyo, Sengmoon
AU  - Pyo S
AD  - Department of Chemistry, Konkuk University, 143-701, Seoul, Korea.
FAU - Sung Kim, Jun
AU  - Sung Kim J
AD  - Department of Physics, Pohang University of Science and Technology, Pohang, 
      Gyungbuk 790-784, Korea.
FAU - Campbell, Eleanor E B
AU  - Campbell EE
AD  - 1] Division of Quantum Phases and Devices, School of Physics, Konkuk University, 
      143-701, Seoul, Korea [2] EaStCHEM, School of Chemistry, University of Edinburgh, 
      David Brewster Road, Edinburgh EH9 3FJ, United Kingdom.
FAU - Hyoung Lee, Wi
AU  - Hyoung Lee W
AD  - Department of Organic and Nano System Engineering, Konkuk University, 143-701, 
      Seoul, Korea.
FAU - Wook Lee, Sang
AU  - Wook Lee S
AD  - Division of Quantum Phases and Devices, School of Physics, Konkuk University, 
      143-701, Seoul, Korea.
LA  - eng
PT  - Journal Article
PT  - Research Support, Non-U.S. Gov't
DEP - 20150511
PL  - England
TA  - Sci Rep
JT  - Scientific reports
JID - 101563288
PMC - PMC4426698
EDAT- 2015/05/12 06:00
MHDA- 2015/05/12 06:01
PMCR- 2015/05/11
CRDT- 2015/05/12 06:00
PHST- 2015/01/27 00:00 [received]
PHST- 2015/04/02 00:00 [accepted]
PHST- 2015/05/12 06:00 [entrez]
PHST- 2015/05/12 06:00 [pubmed]
PHST- 2015/05/12 06:01 [medline]
PHST- 2015/05/11 00:00 [pmc-release]
AID - srep10220 [pii]
AID - 10.1038/srep10220 [doi]
PST - epublish
SO  - Sci Rep. 2015 May 11;5:10220. doi: 10.1038/srep10220.