PMID- 26458105
OWN - NLM
STAT- PubMed-not-MEDLINE
DCOM- 20160202
LR  - 20151103
IS  - 1520-6882 (Electronic)
IS  - 0003-2700 (Linking)
VI  - 87
IP  - 21
DP  - 2015 Nov 3
TI  - Depth-Resolved X-ray Absorption Spectroscopy by Means of Grazing Emission X-ray 
      Fluorescence.
PG  - 10815-21
LID - 10.1021/acs.analchem.5b03346 [doi]
AB  - Grazing emission X-ray fluorescence (GEXRF) is well suited for nondestructive 
      elemental-sensitive depth-profiling measurements on samples with nanometer-sized 
      features. By varying the grazing emission angle under which the X-ray 
      fluorescence signal is detected, the probed depth range can be tuned from a few 
      to several hundred nanometers. The dependence of the XRF intensity on the grazing 
      emission angle can be assessed in a sequence of measurements or in a 
      scanning-free approach using a position-sensitive area detector. Hereafter, we 
      will show that the combination of scanning-free GEXRF and fluorescence detected 
      X-ray absorption spectroscopy (XAS) allows for depth-resolved chemical speciation 
      measurements with nanometer-scale accuracy. While the conventional grazing 
      emission geometry is advantageous to minimize self-absorption effects, the use of 
      a scanning-free setup makes the sequential scanning of the grazing emission 
      angles obsolete and paves the way toward time-resolved depth-sensitive XAS 
      measurements. The presented experimental approach was applied to study the 
      surface oxidation of an Fe layer on the top of bulk Si and of a Ge bulk sample. 
      Thanks to the penetrating properties and the insensitivity toward the electric 
      conduction properties of the incident and emitted X-rays, the presented 
      experimental approach is well suited for in situ sample surface studies in the 
      nanometer regime.
FAU - Kayser, Yves
AU  - Kayser Y
AD  - Paul Scherrer Institut , 5232 Villigen-PSI, Switzerland.
FAU - Sa, Jacinto
AU  - Sa J
AD  - University of Uppsala , Angstrom Laboratory, Department of Chemistry, 751 05 
      Uppsala, Sweden.
AD  - Polish Academy of Sciences , Institute of Physical Chemistry, 01-224 Warsaw, 
      Poland.
FAU - Szlachetko, Jakub
AU  - Szlachetko J
AD  - Paul Scherrer Institut , 5232 Villigen-PSI, Switzerland.
AD  - Jan Kochanowski University , Institute of Physics, 25-406 Kielce, Poland.
LA  - eng
PT  - Journal Article
DEP - 20151023
PL  - United States
TA  - Anal Chem
JT  - Analytical chemistry
JID - 0370536
EDAT- 2015/10/13 06:00
MHDA- 2015/10/13 06:01
CRDT- 2015/10/13 06:00
PHST- 2015/10/13 06:00 [entrez]
PHST- 2015/10/13 06:00 [pubmed]
PHST- 2015/10/13 06:01 [medline]
AID - 10.1021/acs.analchem.5b03346 [doi]
PST - ppublish
SO  - Anal Chem. 2015 Nov 3;87(21):10815-21. doi: 10.1021/acs.analchem.5b03346. Epub 
      2015 Oct 23.