PMID- 26726369 OWN - NLM STAT- PubMed-not-MEDLINE DCOM- 20160208 LR - 20190715 IS - 1533-4899 (Electronic) IS - 1533-4880 (Linking) VI - 15 IP - 10 DP - 2015 Oct TI - Elevated Temperature Operation of 4H-SiC Nanoribbon Field Effect Transistors. PG - 7551-4 AB - We fabricated 4H-SiC nanoribbon field effect transistors (FETs) of various channel thickness (tch) of 100~500 nm by a "top-down" approach, using a lithography and plasma etching process. We studied the dependence of the device transfer characteristics on the channel geometry. This demonstrated that fabricated SiC nanoribbon FETs with a tch of 100 nm show normally-on characteristics, and have a threshold voltage of -12 V, and a maximum transconductance value of 8.8 mS, which shows improved drain current degradation of the SiC nanoribbon FETs with tch = 100 nm at elevated temperature. This can be attributed to the improved heat dissipation, enhanced channel mobility, and together with widening of effective channel thickness depletion induced. FAU - Kang, Min Seok AU - Kang MS FAU - Yu, Susanna AU - Yu S FAU - Koo, Sang Mo AU - Koo SM LA - eng PT - Journal Article PT - Research Support, Non-U.S. Gov't PL - United States TA - J Nanosci Nanotechnol JT - Journal of nanoscience and nanotechnology JID - 101088195 EDAT- 2016/01/05 06:00 MHDA- 2016/01/05 06:01 CRDT- 2016/01/05 06:00 PHST- 2016/01/05 06:00 [entrez] PHST- 2016/01/05 06:00 [pubmed] PHST- 2016/01/05 06:01 [medline] AID - 10.1166/jnn.2015.11166 [doi] PST - ppublish SO - J Nanosci Nanotechnol. 2015 Oct;15(10):7551-4. doi: 10.1166/jnn.2015.11166.