PMID- 26735305 OWN - NLM STAT- PubMed-not-MEDLINE DCOM- 20160527 LR - 20160126 IS - 1936-086X (Electronic) IS - 1936-0851 (Linking) VI - 10 IP - 1 DP - 2016 Jan 26 TI - Oxidation Effect in Octahedral Hafnium Disulfide Thin Film. PG - 1309-16 LID - 10.1021/acsnano.5b06680 [doi] AB - Atomically smooth van der Waals materials are structurally stable in a monolayer and a few layers but are susceptible to oxygen-rich environments. In particular, recently emerging materials such as black phosphorus and perovskite have revealed stronger environmental sensitivity than other two-dimensional layered materials, often obscuring the interesting intrinsic electronic and optical properties. Unleashing the true potential of these materials requires oxidation-free sample preparation that protects thin flakes from air exposure. Here, we fabricated few-layer hafnium disulfide (HfS2) field effect transistors (FETs) using an integrated vacuum cluster system and study their electronic properties and stability under ambient conditions. By performing all the device fabrication and characterization procedure under an oxygen- and moisture-free environment, we found that few-layer AA-stacking HfS2-FETs display excellent field effect responses (Ion/Ioff approximately 10(7)) with reduced hysteresis compared to the FETs prepared under ambient conditions. Oxidation of HfS2 occurs uniformly over the entire area, increasing the film thickness by 250% at a prolonged oxidation time of >120 h, while defects on the surface are the preferential initial oxidation sites. We further demonstrated that the stability of the device in air is significantly improved by passivating FETs with BN in a vacuum cluster. FAU - Chae, Sang Hoon AU - Chae SH AD - Center for Integrated Nanostructure Physics, Institute for Basic Science (IBS), double daggerDepartment of Energy Science, and section signDepartment of Physics, Sungkyunkwan University , Suwon 440-746, Republic of Korea. FAU - Jin, Youngjo AU - Jin Y AD - Center for Integrated Nanostructure Physics, Institute for Basic Science (IBS), double daggerDepartment of Energy Science, and section signDepartment of Physics, Sungkyunkwan University , Suwon 440-746, Republic of Korea. FAU - Kim, Tae Soo AU - Kim TS AD - Center for Integrated Nanostructure Physics, Institute for Basic Science (IBS), double daggerDepartment of Energy Science, and section signDepartment of Physics, Sungkyunkwan University , Suwon 440-746, Republic of Korea. FAU - Chung, Dong Seob AU - Chung DS AD - Center for Integrated Nanostructure Physics, Institute for Basic Science (IBS), double daggerDepartment of Energy Science, and section signDepartment of Physics, Sungkyunkwan University , Suwon 440-746, Republic of Korea. FAU - Na, Hyunyeong AU - Na H AD - Center for Integrated Nanostructure Physics, Institute for Basic Science (IBS), double daggerDepartment of Energy Science, and section signDepartment of Physics, Sungkyunkwan University , Suwon 440-746, Republic of Korea. FAU - Nam, Honggi AU - Nam H AD - Center for Integrated Nanostructure Physics, Institute for Basic Science (IBS), double daggerDepartment of Energy Science, and section signDepartment of Physics, Sungkyunkwan University , Suwon 440-746, Republic of Korea. FAU - Kim, Hyun AU - Kim H AD - Center for Integrated Nanostructure Physics, Institute for Basic Science (IBS), double daggerDepartment of Energy Science, and section signDepartment of Physics, Sungkyunkwan University , Suwon 440-746, Republic of Korea. FAU - Perello, David J AU - Perello DJ AD - Center for Integrated Nanostructure Physics, Institute for Basic Science (IBS), double daggerDepartment of Energy Science, and section signDepartment of Physics, Sungkyunkwan University , Suwon 440-746, Republic of Korea. FAU - Jeong, Hye Yun AU - Jeong HY AD - Center for Integrated Nanostructure Physics, Institute for Basic Science (IBS), double daggerDepartment of Energy Science, and section signDepartment of Physics, Sungkyunkwan University , Suwon 440-746, Republic of Korea. FAU - Ly, Thuc Hue AU - Ly TH AD - Center for Integrated Nanostructure Physics, Institute for Basic Science (IBS), double daggerDepartment of Energy Science, and section signDepartment of Physics, Sungkyunkwan University , Suwon 440-746, Republic of Korea. FAU - Lee, Young Hee AU - Lee YH AD - Center for Integrated Nanostructure Physics, Institute for Basic Science (IBS), double daggerDepartment of Energy Science, and section signDepartment of Physics, Sungkyunkwan University , Suwon 440-746, Republic of Korea. LA - eng PT - Journal Article PT - Research Support, Non-U.S. Gov't DEP - 20160111 PL - United States TA - ACS Nano JT - ACS nano JID - 101313589 OTO - NOTNLM OT - boron nitride OT - field effect transistor OT - glovebox OT - hafnium disulfide OT - oxidation OT - vacuum cluster EDAT- 2016/01/07 06:00 MHDA- 2016/01/07 06:01 CRDT- 2016/01/07 06:00 PHST- 2016/01/07 06:00 [entrez] PHST- 2016/01/07 06:00 [pubmed] PHST- 2016/01/07 06:01 [medline] AID - 10.1021/acsnano.5b06680 [doi] PST - ppublish SO - ACS Nano. 2016 Jan 26;10(1):1309-16. doi: 10.1021/acsnano.5b06680. Epub 2016 Jan 11.