PMID- 26954771 OWN - NLM STAT- PubMed-not-MEDLINE DCOM- 20160810 LR - 20160323 IS - 1944-8252 (Electronic) IS - 1944-8244 (Linking) VI - 8 IP - 11 DP - 2016 Mar 23 TI - Poly(cyclohexylethylene)-block-Poly(lactide) Oligomers for Ultrasmall Nanopatterning Using Atomic Layer Deposition. PG - 7431-9 LID - 10.1021/acsami.5b12785 [doi] AB - Poly(cyclohexylethylene)-block-poly(lactide) (PCHE-PLA) block polymers were synthesized through a combination of anionic polymerization, heterogeneous catalytic hydrogenation and controlled ring-opening polymerization. Ordered thin films of PCHE-PLA with ultrasmall hexagonally packed cylinders oriented perpendicularly to the substrate surface were prepared by spin-coating and subsequent solvent vapor annealing for use in two distinct templating strategies. In one approach, selective hydrolytic degradation of the PLA domains generated nanoporous PCHE templates with an average pore diameter of 5 +/- 1 nm corroborated by atomic force microscopy and grazing incidence small-angle X-ray scattering. Alternatively, sequential infiltration synthesis (SIS) was employed to deposit Al2O3 selectively into the PLA domains of PCHE-PLA thin films. A combination of argon ion milling and O2 reactive ion etching (RIE) enabled the replication of the Al2O3 nanoarray from the PCHE-PLA template on diverse substrates including silicon and gold with feature diameters less than 10 nm. FAU - Yao, Li AU - Yao L AD - Department of Chemistry and double daggerDepartment of Chemical Engineering and Materials Science, University of Minnesota , Minneapolis, Minnesota 55455-0431, United States. FAU - Oquendo, Luis E AU - Oquendo LE AD - Department of Chemistry and double daggerDepartment of Chemical Engineering and Materials Science, University of Minnesota , Minneapolis, Minnesota 55455-0431, United States. FAU - Schulze, Morgan W AU - Schulze MW AD - Department of Chemistry and double daggerDepartment of Chemical Engineering and Materials Science, University of Minnesota , Minneapolis, Minnesota 55455-0431, United States. FAU - Lewis, Ronald M 3rd AU - Lewis RM 3rd AD - Department of Chemistry and double daggerDepartment of Chemical Engineering and Materials Science, University of Minnesota , Minneapolis, Minnesota 55455-0431, United States. FAU - Gladfelter, Wayne L AU - Gladfelter WL AD - Department of Chemistry and double daggerDepartment of Chemical Engineering and Materials Science, University of Minnesota , Minneapolis, Minnesota 55455-0431, United States. FAU - Hillmyer, Marc A AU - Hillmyer MA AD - Department of Chemistry and double daggerDepartment of Chemical Engineering and Materials Science, University of Minnesota , Minneapolis, Minnesota 55455-0431, United States. LA - eng PT - Journal Article PT - Research Support, Non-U.S. Gov't PT - Research Support, U.S. Gov't, Non-P.H.S. DEP - 20160308 PL - United States TA - ACS Appl Mater Interfaces JT - ACS applied materials & interfaces JID - 101504991 OTO - NOTNLM OT - atomic layer deposition OT - block polymer OT - nanolithography OT - nanopores OT - selective infiltration synthesis OT - self-assembly OT - solvent vapor annealing EDAT- 2016/03/10 06:00 MHDA- 2016/03/10 06:01 CRDT- 2016/03/09 06:00 PHST- 2016/03/09 06:00 [entrez] PHST- 2016/03/10 06:00 [pubmed] PHST- 2016/03/10 06:01 [medline] AID - 10.1021/acsami.5b12785 [doi] PST - ppublish SO - ACS Appl Mater Interfaces. 2016 Mar 23;8(11):7431-9. doi: 10.1021/acsami.5b12785. Epub 2016 Mar 8.