PMID- 27046164 OWN - NLM STAT- PubMed-not-MEDLINE DCOM- 20170425 LR - 20170425 IS - 1944-8252 (Electronic) IS - 1944-8244 (Linking) VI - 8 IP - 16 DP - 2016 Apr 27 TI - Vacuum-Ultraviolet Promoted Oxidative Micro Photoetching of Graphene Oxide. PG - 10627-35 LID - 10.1021/acsami.6b00994 [doi] AB - Microprocessing of graphene oxide (GO) films is of fundamental importance in fabricating graphene-based devices. We demonstrate the photoetching of GO sheets using vacuum-ultraviolet (VUV, lambda = 172 nm) light under controlled atmospheric pressure. X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM) and differential interference contrast microscopy (DIC) studies revealed that the photoetching of GO films successfully proceeded in the regions exposed to VUV irradiation in the oxygen-containing atmosphere. Precise photoetching of the GO sheets was achieved at a vacuum pressure of 5 x 10(3) Pa with VUV light irradiation for 20 min. This was followed by VUV irradiation in a high vacuum (<10(-3) Pa) and sonication in water. The photoetched GO sheets then transformed into reduced GO (rGO) patterns. The minimum feature fabricated by this method was 2 mum wide lines aligned at an interval of 4 mum. This method provides a cost-effective way to fabricate rGO patterns with fewer boundaries between rGO sheets and offers a better integrity of rGO, which can be promising for further applications in micro mechanics, micro electrochemistry, optoelectronics, etc. FAU - Tu, Yudi AU - Tu Y AD - Department of Materials Science and Engineering, Graduate School of Engineering, Kyoto University , Kyoto 606-8501, Japan. FAU - Utsunomiya, Toru AU - Utsunomiya T AD - Department of Materials Science and Engineering, Graduate School of Engineering, Kyoto University , Kyoto 606-8501, Japan. FAU - Ichii, Takashi AU - Ichii T AD - Department of Materials Science and Engineering, Graduate School of Engineering, Kyoto University , Kyoto 606-8501, Japan. FAU - Sugimura, Hiroyuki AU - Sugimura H AD - Department of Materials Science and Engineering, Graduate School of Engineering, Kyoto University , Kyoto 606-8501, Japan. LA - eng PT - Journal Article PT - Research Support, Non-U.S. Gov't DEP - 20160413 PL - United States TA - ACS Appl Mater Interfaces JT - ACS applied materials & interfaces JID - 101504991 OTO - NOTNLM OT - differential interference contrast microscopy OT - graphene oxide OT - photochemistry OT - photoetching OT - vacuum-ultraviolet EDAT- 2016/04/06 06:00 MHDA- 2016/04/06 06:01 CRDT- 2016/04/06 06:00 PHST- 2016/04/06 06:00 [entrez] PHST- 2016/04/06 06:00 [pubmed] PHST- 2016/04/06 06:01 [medline] AID - 10.1021/acsami.6b00994 [doi] PST - ppublish SO - ACS Appl Mater Interfaces. 2016 Apr 27;8(16):10627-35. doi: 10.1021/acsami.6b00994. Epub 2016 Apr 13.