PMID- 27131717
OWN - NLM
STAT- PubMed-not-MEDLINE
DCOM- 20170424
LR  - 20170424
IS  - 1089-7623 (Electronic)
IS  - 0034-6748 (Linking)
VI  - 87
IP  - 4
DP  - 2016 Apr
TI  - Note: Evaluation of slurry particle size analyzers for chemical mechanical 
      planarization process.
PG  - 046101
LID - 10.1063/1.4945692 [doi]
AB  - In the chemical mechanical planarization (CMP) process, slurry particle size is 
      important because large particles can cause defects. Hence, selection of an 
      appropriate particle measuring system is necessary in the CMP process. In this 
      study, a scanning mobility particle sizer (SMPS) and dynamic light scattering 
      (DLS) were compared for particle size distribution (PSD) measurements. In 
      addition, the actual particle size and shape were confirmed by transmission 
      electron microscope (TEM) results. SMPS classifies the particle size according to 
      the electrical mobility, and measures the particle concentration (single particle 
      measurement). On the other hand, the DLS measures the particle size distribution 
      by analyzing scattered light from multiple particles (multiple particle 
      measurement). For the slurry particles selected for evaluation, it is observed 
      that SMPS shows bi-modal particle sizes 30 nm and 80 nm, which closely matches 
      with the TEM measurements, whereas DLS shows only single mode distribution in the 
      range of 90 nm to 100 nm and showing incapability of measuring small particles. 
      Hence, SMPS can be a better choice for the evaluation of CMP slurry particle size 
      and concentration measurements.
FAU - Jang, Sunjae
AU  - Jang S
AD  - School of Mechanical Engineering, Sungkyunkwan University, Suwon 440-746, South 
      Korea.
FAU - Kulkarni, Atul
AU  - Kulkarni A
AD  - School of Mechanical Engineering, Sungkyunkwan University, Suwon 440-746, South 
      Korea.
FAU - Qin, Hongyi
AU  - Qin H
AD  - SKKU Advanced Institute of Nano Technology (SAINT), Sungkyunkwan University, 
      Suwon 440-746, South Korea.
FAU - Kim, Taesung
AU  - Kim T
AD  - School of Mechanical Engineering, Sungkyunkwan University, Suwon 440-746, South 
      Korea.
LA  - eng
PT  - Journal Article
PT  - Research Support, Non-U.S. Gov't
PL  - United States
TA  - Rev Sci Instrum
JT  - The Review of scientific instruments
JID - 0405571
EDAT- 2016/05/02 06:00
MHDA- 2016/05/02 06:01
CRDT- 2016/05/02 06:00
PHST- 2016/05/02 06:00 [entrez]
PHST- 2016/05/02 06:00 [pubmed]
PHST- 2016/05/02 06:01 [medline]
AID - 10.1063/1.4945692 [doi]
PST - ppublish
SO  - Rev Sci Instrum. 2016 Apr;87(4):046101. doi: 10.1063/1.4945692.