PMID- 27479713
OWN - NLM
STAT- PubMed-not-MEDLINE
DCOM- 20180718
LR  - 20180718
IS  - 1361-6528 (Electronic)
IS  - 0957-4484 (Linking)
VI  - 27
IP  - 36
DP  - 2016 Sep 9
TI  - Metal assisted focused-ion beam nanopatterning.
PG  - 36LT01
LID - 10.1088/0957-4484/27/36/36LT01 [doi]
AB  - Focused-ion beam milling is a versatile technique for maskless nanofabrication. 
      However, the nonuniform ion beam profile and material redeposition tend to 
      disfigure the surface morphology near the milling areas and degrade the fidelity 
      of nanoscale pattern transfer, limiting the applicability of the technique. The 
      ion-beam induced damage can deteriorate the performance of photonic devices and 
      hinders the precision of template fabrication for nanoimprint lithography. To 
      solve the issue, we present a metal assisted focused-ion beam (MAFIB) process in 
      which a removable sacrificial aluminum layer is utilized to protect the working 
      material. The new technique ensures smooth surfaces and fine milling edges; in 
      addition, it permits direct formation of v-shaped grooves with tunable angles on 
      dielectric substrates or metal films, silver for instance, which are rarely 
      achieved by using traditional nanolithography followed by anisotropic etching 
      processes. MAFIB was successfully demonstrated to directly create nanopatterns on 
      different types of substrates with high fidelity and reproducibility. The 
      technique provides the capability and flexibility necessary to fabricate 
      nanophotonic devices and nanoimprint templates.
FAU - Kannegulla, Akash
AU  - Kannegulla A
AD  - School of Electrical Engineering and Computer Science, Oregon State University, 
      OR 97331, USA.
FAU - Cheng, Li-Jing
AU  - Cheng LJ
LA  - eng
PT  - Journal Article
DEP - 20160801
PL  - England
TA  - Nanotechnology
JT  - Nanotechnology
JID - 101241272
EDAT- 2016/08/02 06:00
MHDA- 2016/08/02 06:01
CRDT- 2016/08/02 06:00
PHST- 2016/08/02 06:00 [entrez]
PHST- 2016/08/02 06:00 [pubmed]
PHST- 2016/08/02 06:01 [medline]
AID - 10.1088/0957-4484/27/36/36LT01 [doi]
PST - ppublish
SO  - Nanotechnology. 2016 Sep 9;27(36):36LT01. doi: 10.1088/0957-4484/27/36/36LT01. 
      Epub 2016 Aug 1.