PMID- 28218234 OWN - NLM STAT- PubMed-not-MEDLINE DCOM- 20180730 LR - 20181113 IS - 2045-2322 (Electronic) IS - 2045-2322 (Linking) VI - 7 DP - 2017 Feb 20 TI - Durability-enhanced two-dimensional hole gas of C-H diamond surface for complementary power inverter applications. PG - 42368 LID - 10.1038/srep42368 [doi] LID - 42368 AB - Complementary power field effect transistors (FETs) based on wide bandgap materials not only provide high-voltage switching capability with the reduction of on-resistance and switching losses, but also enable a smart inverter system by the dramatic simplification of external circuits. However, p-channel power FETs with equivalent performance to those of n-channel FETs are not obtained in any wide bandgap material other than diamond. Here we show that a breakdown voltage of more than 1600 V has been obtained in a diamond metal-oxide-semiconductor (MOS) FET with a p-channel based on a two-dimensional hole gas (2DHG). Atomic layer deposited (ALD) Al(2)O(3) induces the 2DHG ubiquitously on a hydrogen-terminated (C-H) diamond surface and also acts as both gate insulator and passivation layer. The high voltage performance is equivalent to that of state-of-the-art SiC planar n-channel FETs and AlGaN/GaN FETs. The drain current density in the on-state is also comparable to that of these two FETs with similar device size and V(B). FAU - Kawarada, Hiroshi AU - Kawarada H AD - Faculty of Science and Engineering, Waseda University, 3-4-1, Ohkubo, Shinjuku-ku, Tokyo 169-8555, Japan. AD - The Kagami Memorial Laboratory for Materials Science and Technology, Waseda University, 2-8-26 Nishiwaseda, Shinjuku, Tokyo 169-0051, Japan. AD - Research Organization for Nano &Life Innovation, Waseda University, 513 Waseda-tsurumaki, Shinjuku, Tokyo 162-0041, Japan. FAU - Yamada, Tetsuya AU - Yamada T AD - Faculty of Science and Engineering, Waseda University, 3-4-1, Ohkubo, Shinjuku-ku, Tokyo 169-8555, Japan. FAU - Xu, Dechen AU - Xu D AD - Faculty of Science and Engineering, Waseda University, 3-4-1, Ohkubo, Shinjuku-ku, Tokyo 169-8555, Japan. FAU - Tsuboi, Hidetoshi AU - Tsuboi H AD - Faculty of Science and Engineering, Waseda University, 3-4-1, Ohkubo, Shinjuku-ku, Tokyo 169-8555, Japan. FAU - Kitabayashi, Yuya AU - Kitabayashi Y AD - Faculty of Science and Engineering, Waseda University, 3-4-1, Ohkubo, Shinjuku-ku, Tokyo 169-8555, Japan. FAU - Matsumura, Daisuke AU - Matsumura D AD - Faculty of Science and Engineering, Waseda University, 3-4-1, Ohkubo, Shinjuku-ku, Tokyo 169-8555, Japan. FAU - Shibata, Masanobu AU - Shibata M AD - Faculty of Science and Engineering, Waseda University, 3-4-1, Ohkubo, Shinjuku-ku, Tokyo 169-8555, Japan. FAU - Kudo, Takuya AU - Kudo T AD - Faculty of Science and Engineering, Waseda University, 3-4-1, Ohkubo, Shinjuku-ku, Tokyo 169-8555, Japan. FAU - Inaba, Masafumi AU - Inaba M AD - Faculty of Science and Engineering, Waseda University, 3-4-1, Ohkubo, Shinjuku-ku, Tokyo 169-8555, Japan. FAU - Hiraiwa, Atsushi AU - Hiraiwa A AD - Research Organization for Nano &Life Innovation, Waseda University, 513 Waseda-tsurumaki, Shinjuku, Tokyo 162-0041, Japan. LA - eng PT - Journal Article PT - Research Support, Non-U.S. Gov't DEP - 20170220 PL - England TA - Sci Rep JT - Scientific reports JID - 101563288 PMC - PMC5316979 COIS- The authors declare no competing financial interests. EDAT- 2017/02/22 06:00 MHDA- 2017/02/22 06:01 PMCR- 2017/02/20 CRDT- 2017/02/21 06:00 PHST- 2016/08/04 00:00 [received] PHST- 2017/01/10 00:00 [accepted] PHST- 2017/02/21 06:00 [entrez] PHST- 2017/02/22 06:00 [pubmed] PHST- 2017/02/22 06:01 [medline] PHST- 2017/02/20 00:00 [pmc-release] AID - srep42368 [pii] AID - 10.1038/srep42368 [doi] PST - epublish SO - Sci Rep. 2017 Feb 20;7:42368. doi: 10.1038/srep42368.