PMID- 28489103 OWN - NLM STAT- PubMed-not-MEDLINE DCOM- 20180202 LR - 20180202 IS - 1463-9084 (Electronic) IS - 1463-9076 (Linking) VI - 19 IP - 20 DP - 2017 May 24 TI - Triethanolamine doped multilayer MoS(2) field effect transistors. PG - 13133-13139 LID - 10.1039/c7cp00589j [doi] AB - Chemical doping has been investigated as an alternative method of conventional ion implantation for two-dimensional materials. We herein report chemically doped multilayer molybdenum disulfide (MoS(2)) field effect transistors (FETs) through n-type channel doping, wherein triethanolamine (TEOA) is used as an n-type dopant. As a result of the TEOA doping process, the electrical performances of multilayer MoS(2) FETs were enhanced at room temperature. Extracted field effect mobility was estimated to be approximately 30 cm(2) V(-1) s(-1) after the surface doping process, which is 10 times higher than that of the pristine device. Subthreshold swing and contact resistance were also improved after the TEOA doping process. The enhancement of the subthreshold swing was demonstrated by using an independent FET model. Furthermore, we found that the doping level can be effectively controlled by the heat treatment method. These results demonstrate a promising material system that is easily controlled with high performance, while elucidating the underlying mechanism of improved electrical properties by the doping effect in a multilayered scheme. FAU - Ryu, Min-Yeul AU - Ryu MY AD - School of Electrical Engineering, Korea University, Seoul 02481, South Korea. gtkim@korea.ac.kr. FAU - Jang, Ho-Kyun AU - Jang HK FAU - Lee, Kook Jin AU - Lee KJ FAU - Piao, Mingxing AU - Piao M FAU - Ko, Seung-Pil AU - Ko SP FAU - Shin, Minju AU - Shin M FAU - Huh, Junghwan AU - Huh J FAU - Kim, Gyu-Tae AU - Kim GT LA - eng PT - Journal Article PL - England TA - Phys Chem Chem Phys JT - Physical chemistry chemical physics : PCCP JID - 100888160 EDAT- 2017/05/11 06:00 MHDA- 2017/05/11 06:01 CRDT- 2017/05/11 06:00 PHST- 2017/05/11 06:00 [pubmed] PHST- 2017/05/11 06:01 [medline] PHST- 2017/05/11 06:00 [entrez] AID - 10.1039/c7cp00589j [doi] PST - ppublish SO - Phys Chem Chem Phys. 2017 May 24;19(20):13133-13139. doi: 10.1039/c7cp00589j.