PMID- 28834243 OWN - NLM STAT- PubMed-not-MEDLINE LR - 20191120 IS - 1613-6829 (Electronic) IS - 1613-6810 (Linking) VI - 13 IP - 39 DP - 2017 Oct TI - A Novel and Facile Route to Synthesize Atomic-Layered MoS(2) Film for Large-Area Electronics. LID - 10.1002/smll.201701306 [doi] AB - High-quality and large-area molybdenum disulfide (MoS(2) ) thin film is highly desirable for applications in large-area electronics. However, there remains a challenge in attaining MoS(2) film of reasonable crystallinity due to the absence of appropriate choice and control of precursors, as well as choice of suitable growth substrates. Herein, a novel and facile route is reported for synthesizing few-layered MoS(2) film with new precursors via chemical vapor deposition. Prior to growth, an aqueous solution of sodium molybdate as the molybdenum precursor is spun onto the growth substrate and dimethyl disulfide as the liquid sulfur precursor is supplied with a bubbling system during growth. To supplement the limiting effect of Mo (sodium molybdate), a supplementary Mo is supplied by dissolving molybdenum hexacarbonyl (Mo(CO)(6) ) in the liquid sulfur precursor delivered by the bubbler. By precisely controlling the amounts of precursors and hydrogen flow, full coverage of MoS(2) film is readily achievable in 20 min. Large-area MoS(2) field effect transistors (FETs) fabricated with a conventional photolithography have a carrier mobility as high as 18.9 cm(2) V(-1) s(-1) , which is the highest reported for bottom-gated MoS(2) -FETs fabricated via photolithography with an on/off ratio of approximately 10(5) at room temperature. CI - (c) 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. FAU - Boandoh, Stephen AU - Boandoh S AUID- ORCID: 0000-0003-3245-5184 AD - Department of Energy and Materials Engineering, Dongguk University-Seoul, Seoul, 04620, Republic of Korea. FAU - Choi, Soo Ho AU - Choi SH AD - Department of Physics, Dongguk University-Seoul, Seoul, 04620, Republic of Korea. FAU - Park, Ji-Hoon AU - Park JH AD - Center for Integrated Nanostructure Physics, Institute for Basic Science (IBS), Suwon, 16419, Republic of Korea. AD - Sungkyunkwan University (SKKU), Suwon, 16419, Republic of Korea. FAU - Park, So Young AU - Park SY AD - Department of Energy and Materials Engineering, Dongguk University-Seoul, Seoul, 04620, Republic of Korea. FAU - Bang, Seungho AU - Bang S AD - Center for Integrated Nanostructure Physics, Institute for Basic Science (IBS), Suwon, 16419, Republic of Korea. AD - Department of Energy Science, Sungkyunkwan University, Suwon, 16419, Republic of Korea. FAU - Jeong, Mun Seok AU - Jeong MS AD - Center for Integrated Nanostructure Physics, Institute for Basic Science (IBS), Suwon, 16419, Republic of Korea. AD - Department of Energy Science, Sungkyunkwan University, Suwon, 16419, Republic of Korea. FAU - Lee, Joo Song AU - Lee JS AD - Institute of Advanced Composite Materials, Korea Institute of Science and Technology (KIST), San101 Eunha-Ri, Bongdong-Eup, Wanju-Gun, Jeollabuk-Do, 565-902, Republic of Korea. FAU - Kim, Hyeong Jin AU - Kim HJ AD - Institute of Advanced Composite Materials, Korea Institute of Science and Technology (KIST), San101 Eunha-Ri, Bongdong-Eup, Wanju-Gun, Jeollabuk-Do, 565-902, Republic of Korea. FAU - Yang, Woochul AU - Yang W AD - Department of Physics, Dongguk University-Seoul, Seoul, 04620, Republic of Korea. FAU - Choi, Jae-Young AU - Choi JY AD - School of Advanced Materials Science & Engineering, Sungkyunkwan University (SKKU), Suwon, 16419, Republic of Korea. FAU - Kim, Soo Min AU - Kim SM AD - Institute of Advanced Composite Materials, Korea Institute of Science and Technology (KIST), San101 Eunha-Ri, Bongdong-Eup, Wanju-Gun, Jeollabuk-Do, 565-902, Republic of Korea. FAU - Kim, Ki Kang AU - Kim KK AUID- ORCID: 0000-0003-1008-6744 AD - Department of Energy and Materials Engineering, Dongguk University-Seoul, Seoul, 04620, Republic of Korea. LA - eng PT - Journal Article PT - Research Support, Non-U.S. Gov't DEP - 20170822 PL - Germany TA - Small JT - Small (Weinheim an der Bergstrasse, Germany) JID - 101235338 OTO - NOTNLM OT - MoS2 OT - chemical vapor deposition OT - growth mechanism OT - photoluminescence OT - precursors EDAT- 2017/08/24 06:00 MHDA- 2017/08/24 06:01 CRDT- 2017/08/24 06:00 PHST- 2017/04/24 00:00 [received] PHST- 2017/07/06 00:00 [revised] PHST- 2017/08/24 06:00 [pubmed] PHST- 2017/08/24 06:01 [medline] PHST- 2017/08/24 06:00 [entrez] AID - 10.1002/smll.201701306 [doi] PST - ppublish SO - Small. 2017 Oct;13(39). doi: 10.1002/smll.201701306. Epub 2017 Aug 22.