PMID- 29273714
OWN - NLM
STAT- PubMed-not-MEDLINE
LR  - 20200309
IS  - 2045-2322 (Electronic)
IS  - 2045-2322 (Linking)
VI  - 7
IP  - 1
DP  - 2017 Dec 22
TI  - Electron beam induced removal of PMMA layer used for graphene transfer.
PG  - 18058
LID - 10.1038/s41598-017-18444-1 [doi]
LID - 18058
AB  - We demonstrate the development of an effective technique to remove the poly 
      methyl methacrylate (PMMA) layer used for transferring graphene synthesized by a 
      chemical vapor deposition (CVD). This was achieved utilizing electron-beam 
      bombardment and following developing processes, prior to the use of conventional 
      organic solvents. Field-effect transistors were fabricated on the transferred 
      graphene in order to explore their Dirac points and carrier motilities in the 
      ambient condition - the results were then compared with those from the 
      conventional wet chemical treatment. It was found that the Dirac points were 
      located close to the zero gate bias when compared to those from the acetone and 
      the acetic acid treatments. Most significantly, the field-effect mobility reached 
      as high as 6770 cm(2)/Vs and 7350 cm(2)/Vs on average for holes and electrons, 
      respectively, which is more than seven times improvement in comparison to 
      conventional acetone treatments for CVD-grown graphene devices.
FAU - Son, B H
AU  - Son BH
AD  - Department of Physics and Department of Energy Systems Research, Ajou University, 
      Suwon, 16499, Korea.
FAU - Kim, H S
AU  - Kim HS
AD  - Department of Physics and Department of Energy Systems Research, Ajou University, 
      Suwon, 16499, Korea.
FAU - Jeong, H
AU  - Jeong H
AD  - Department of Physics and Department of Energy Systems Research, Ajou University, 
      Suwon, 16499, Korea.
FAU - Park, Ji-Yong
AU  - Park JY
AUID- ORCID: 0000-0001-5117-3532
AD  - Department of Physics and Department of Energy Systems Research, Ajou University, 
      Suwon, 16499, Korea.
FAU - Lee, Soonil
AU  - Lee S
AD  - Department of Physics and Department of Energy Systems Research, Ajou University, 
      Suwon, 16499, Korea.
FAU - Ahn, Y H
AU  - Ahn YH
AD  - Department of Physics and Department of Energy Systems Research, Ajou University, 
      Suwon, 16499, Korea. ahny@ajou.ac.kr.
LA  - eng
PT  - Journal Article
PT  - Research Support, Non-U.S. Gov't
DEP - 20171222
PL  - England
TA  - Sci Rep
JT  - Scientific reports
JID - 101563288
PMC - PMC5741774
COIS- The authors declare that they have no competing interests.
EDAT- 2017/12/24 06:00
MHDA- 2017/12/24 06:01
PMCR- 2017/12/22
CRDT- 2017/12/24 06:00
PHST- 2017/09/07 00:00 [received]
PHST- 2017/12/12 00:00 [accepted]
PHST- 2017/12/24 06:00 [entrez]
PHST- 2017/12/24 06:00 [pubmed]
PHST- 2017/12/24 06:01 [medline]
PHST- 2017/12/22 00:00 [pmc-release]
AID - 10.1038/s41598-017-18444-1 [pii]
AID - 18444 [pii]
AID - 10.1038/s41598-017-18444-1 [doi]
PST - epublish
SO  - Sci Rep. 2017 Dec 22;7(1):18058. doi: 10.1038/s41598-017-18444-1.