PMID- 29786609 OWN - NLM STAT- PubMed-not-MEDLINE LR - 20191120 IS - 1361-6528 (Electronic) IS - 0957-4484 (Linking) VI - 29 IP - 33 DP - 2018 Aug 17 TI - Comparison of trapped charges and hysteresis behavior in hBN encapsulated single MoS(2) flake based field effect transistors on SiO(2) and hBN substrates. PG - 335202 LID - 10.1088/1361-6528/aac6b0 [doi] AB - Molybdenum disulfide (MoS(2)) based field effect transistors (FETs) are of considerable interest in electronic and opto-electronic applications but often have large hysteresis and threshold voltage instabilities. In this study, by using advanced transfer techniques, hexagonal boron nitride (hBN) encapsulated FETs based on a single, homogeneous and atomic-thin MoS(2) flake are fabricated on hBN and SiO(2) substrates. This allows for a better and a precise comparison between the charge traps at the semiconductor-dielectric interfaces at MoS(2)-SiO(2) and hBN interfaces. The impact of ambient environment and entities on hysteresis is minimized by encapsulating the active MoS(2) layer with a single hBN on both the devices. The device to device variations induced by different MoS(2) layer is also eliminated by employing a single MoS(2) layer for fabricating both devices. After eliminating these additional factors which induce variation in the device characteristics, it is found from the measurements that the trapped charge density is reduced to 1.9 x 10(11) cm(-2) on hBN substrate as compared to 1.1 x 10(12) cm(-2) on SiO(2) substrate. Further, reduced hysteresis and stable threshold voltage are observed on hBN substrate and their dependence on gate sweep rate, sweep range, and gate stress is also studied. This precise comparison between encapsulated devices on SiO(2) and hBN substrates further demonstrate the requirement of hBN substrate and encapsulation for improved and stable performance of MoS(2) FETs. FAU - Lee, Changhee AU - Lee C AD - School of Electronic and Electrical Engineering and Sungkyunkwan Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon 16419, Republic of Korea. FAU - Rathi, Servin AU - Rathi S FAU - Khan, Muhammad Atif AU - Khan MA FAU - Lim, Dongsuk AU - Lim D FAU - Kim, Yunseob AU - Kim Y FAU - Yun, Sun Jin AU - Yun SJ FAU - Youn, Doo-Hyeb AU - Youn DH FAU - Watanabe, Kenji AU - Watanabe K FAU - Taniguchi, Takashi AU - Taniguchi T FAU - Kim, Gil-Ho AU - Kim GH LA - eng PT - Journal Article DEP - 20180522 PL - England TA - Nanotechnology JT - Nanotechnology JID - 101241272 EDAT- 2018/05/23 06:00 MHDA- 2018/05/23 06:01 CRDT- 2018/05/23 06:00 PHST- 2018/05/23 06:00 [pubmed] PHST- 2018/05/23 06:01 [medline] PHST- 2018/05/23 06:00 [entrez] AID - 10.1088/1361-6528/aac6b0 [doi] PST - ppublish SO - Nanotechnology. 2018 Aug 17;29(33):335202. doi: 10.1088/1361-6528/aac6b0. Epub 2018 May 22.