PMID- 30402810 OWN - NLM STAT- MEDLINE DCOM- 20190529 LR - 20190529 IS - 1572-8781 (Electronic) IS - 1387-2176 (Linking) VI - 20 IP - 4 DP - 2018 Nov 6 TI - The microfabrication of mold for polymer microfluidic devices with Zr-based metallic glass. PG - 96 LID - 10.1007/s10544-018-0342-0 [doi] AB - Polymer microfluidic devices are used for many purposes such as microarrays and biochips. The key tool for manufacturing these chips in bulk is an appropriate mold. However, the popular material for making molds is nickel or nickel alloys, which have low stiffness and wear out easily. Zr-based metallic glass is a promising material for micro- or nanomolds because it has good mechanical properties and can be easily formed with high precision. In this paper, Zr-based metallic glass is proposed for use as micromold insert to make poly-(methyl methacrylate) (PMMA) microfluidic devices. Our experiments show that they have good feature integrity and replication quality. Microchannels we fabricated using these replicas did not leak and had good flow performance. Zr-based metallic glass can greatly ease the manufacture of plastic microfluidic devices for research and commercial applications. FAU - Zhang, Xiang AU - Zhang X AUID- ORCID: 0000-0002-6416-558X AD - School of Mechanics & Engineering Science, Zhengzhou University, Zhengzhou, 450001, China. zhangxiang@zzu.edu.cn. AD - National Center for International Joint Research of Micro-Nano Molding Technology, Zhengzhou University, Zhengzhou, 450001, China. zhangxiang@zzu.edu.cn. AD - Key Laboratory for Micro Molding Technology of Henan Province, Zhengzhou University, Zhengzhou, 450001, China. zhangxiang@zzu.edu.cn. FAU - Li, Haotong AU - Li H AD - School of Mechanics & Engineering Science, Zhengzhou University, Zhengzhou, 450001, China. AD - National Center for International Joint Research of Micro-Nano Molding Technology, Zhengzhou University, Zhengzhou, 450001, China. AD - Key Laboratory for Micro Molding Technology of Henan Province, Zhengzhou University, Zhengzhou, 450001, China. FAU - Wang, Zhenxing AU - Wang Z AD - School of Mechanics & Engineering Science, Zhengzhou University, Zhengzhou, 450001, China. AD - National Center for International Joint Research of Micro-Nano Molding Technology, Zhengzhou University, Zhengzhou, 450001, China. AD - Key Laboratory for Micro Molding Technology of Henan Province, Zhengzhou University, Zhengzhou, 450001, China. FAU - Chen, Xueye AU - Chen X AD - College of Mechanical Engineering and Automation, Liaoning University of Technology, Jinzhou, 121001, China. FAU - Li, Qian AU - Li Q AD - School of Mechanics & Engineering Science, Zhengzhou University, Zhengzhou, 450001, China. qianli@zzu.edu.cn. AD - National Center for International Joint Research of Micro-Nano Molding Technology, Zhengzhou University, Zhengzhou, 450001, China. qianli@zzu.edu.cn. AD - Key Laboratory for Micro Molding Technology of Henan Province, Zhengzhou University, Zhengzhou, 450001, China. qianli@zzu.edu.cn. LA - eng PT - Journal Article PT - Research Support, Non-U.S. Gov't DEP - 20181106 PL - United States TA - Biomed Microdevices JT - Biomedical microdevices JID - 100887374 RN - 0 (Polymers) RN - C6V6S92N3C (Zirconium) SB - IM MH - Equipment Design MH - Glass/*chemistry MH - Injections MH - *Lab-On-A-Chip Devices MH - Mechanical Phenomena MH - Polymers/*chemistry MH - Zirconium/*chemistry OTO - NOTNLM OT - Bulk metallic glass OT - Micro mold insert OT - Microstructure replication OT - Polymer micro molding EDAT- 2018/11/08 06:00 MHDA- 2019/05/30 06:00 CRDT- 2018/11/08 06:00 PHST- 2018/11/08 06:00 [entrez] PHST- 2018/11/08 06:00 [pubmed] PHST- 2019/05/30 06:00 [medline] AID - 10.1007/s10544-018-0342-0 [pii] AID - 10.1007/s10544-018-0342-0 [doi] PST - epublish SO - Biomed Microdevices. 2018 Nov 6;20(4):96. doi: 10.1007/s10544-018-0342-0.