PMID- 30404338
OWN - NLM
STAT- PubMed-not-MEDLINE
LR  - 20200930
IS  - 2072-666X (Print)
IS  - 2072-666X (Electronic)
IS  - 2072-666X (Linking)
VI  - 7
IP  - 9
DP  - 2016 Sep 13
TI  - Reliability Design and Electro-Thermal-Optical Simulation of Bridge-Style 
      Infrared Thermal Emitters.
LID - 10.3390/mi7090166 [doi]
LID - 166
AB  - Designs and simulations of silicon-based micro-electromechanical systems (MEMS) 
      infrared (IR) thermal emitters for gas sensing application are presented. The IR 
      thermal emitter is designed as a bridge-style hotplate (BSH) structure suspended 
      on a silicon frame for realizing a good thermal isolation between hotplate and 
      frame. For investigating the reliability of BSH structure, three kinds of fillet 
      structures were designed in the contact corner between hotplate and frame. A 
      3-dimensional finite element method (3D-FEM) is used to investigate the 
      electro-thermal, thermal-mechanical, and thermal-optical properties of BSH IR 
      emitter using software COMSOL(TM) (COMSOL 4.3b, COMSOL Inc., Stockholm, Sweden). 
      The simulation results show that the BSH with oval fillet has the lowest stress 
      distribution and smoothest flows of stress streamlines, while the BSH with square 
      fillet has the highest temperature and stress distribution. The thermal-optical 
      and thermal-response simulations further indicate that the BSH with oval fillet 
      is the optimal design for a reliable IR thermal emitter in spite of having slight 
      inadequacies in emission intensity and modulation bandwidth in comparison with 
      other two structures.
FAU - Zhou, Peng
AU  - Zhou P
AD  - Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, 
      Xiamen 361005, China. zhoup@stu.xmu.edu.cn.
FAU - Chen, Ranbin
AU  - Chen R
AD  - Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, 
      Xiamen 361005, China. chenranbin@126.com.
FAU - Wang, Na
AU  - Wang N
AD  - Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, 
      Xiamen 361005, China. pepperwn@foxmail.com.
FAU - San, Haisheng
AU  - San H
AUID- ORCID: 0000-0002-6019-923X
AD  - Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, 
      Xiamen 361005, China. sanhs@xmu.edu.cn.
FAU - Chen, Xuyuan
AU  - Chen X
AD  - Department of Micro and Nano Systems Technology, Buskerud and Vestfold University 
      College, Horten 3184, Norway. xuyuan.chen@hbv.no.
LA  - eng
GR  - 61574117 and 61274120/National Natural Science Foundation of China/
PT  - Journal Article
DEP - 20160913
PL  - Switzerland
TA  - Micromachines (Basel)
JT  - Micromachines
JID - 101640903
PMC - PMC6190287
OTO - NOTNLM
OT  - finite element method
OT  - infrared emission
OT  - micro-electromechanical systems
OT  - thermal emitter
COIS- The authors declare no conflict of interest.
EDAT- 2016/09/13 00:00
MHDA- 2016/09/13 00:01
PMCR- 2016/09/13
CRDT- 2018/11/09 06:00
PHST- 2016/07/07 00:00 [received]
PHST- 2016/09/01 00:00 [revised]
PHST- 2016/09/05 00:00 [accepted]
PHST- 2018/11/09 06:00 [entrez]
PHST- 2016/09/13 00:00 [pubmed]
PHST- 2016/09/13 00:01 [medline]
PHST- 2016/09/13 00:00 [pmc-release]
AID - mi7090166 [pii]
AID - micromachines-07-00166 [pii]
AID - 10.3390/mi7090166 [doi]
PST - epublish
SO  - Micromachines (Basel). 2016 Sep 13;7(9):166. doi: 10.3390/mi7090166.