PMID- 30547995
OWN - NLM
STAT- PubMed-not-MEDLINE
DCOM- 20181217
LR  - 20190115
IS  - 1539-4794 (Electronic)
IS  - 0146-9592 (Linking)
VI  - 43
IP  - 24
DP  - 2018 Dec 15
TI  - Quantitative assessment and suppression of defect-induced scattering in low-loss 
      mirrors.
PG  - 6025-6028
LID - 10.1364/OL.43.006025 [doi]
AB  - In this Letter, defect-induced scattering in 1064 nm high-reflection coatings 
      prepared by dual ion beam sputtering and its suppression were investigated by 
      artificial nodules, finite-difference time-domain simulations, angular resolved 
      scattering (ARS) measurements, and planarization technology. After establishing 
      the geometric model of the nodules grown from varphi 1 mum SiO(2) microspheres, the 
      far-field scattering of the multiple nodules was determined by intensity 
      superposition. For a nodule density of 100  mm(-2), there is good agreement 
      between the simulated and measured ARS. The total scattering is  approximately 500  ppm for the 
      multilayer coating with artificial nodules, which is more than 10 times that for 
      the coating without nodules. Next, an iterative deposition-etching process was 
      used to planarize the defects, which reduced scattering by almost one order of 
      magnitude. Moreover, detailed characterization of the planarized seeds reveals 
      that the planarization technology is a complex process, and it still does not 
      produce a perfect flat surface. The results showed that there is a pit over each 
      planarized seed in the coating surface, which leads to additional scattering. The 
      possible reasons for the presence of these pits are briefly discussed, and the 
      directions for further research are provided at the end of this Letter.
FAU - Zhang, Lei
AU  - Zhang L
FAU - Wei, Zeyong
AU  - Wei Z
FAU - Zhang, Jinlong
AU  - Zhang J
FAU - Liu, Huasong
AU  - Liu H
FAU - Ji, Yiqin
AU  - Ji Y
FAU - Schroder, Sven
AU  - Schroder S
FAU - Trost, Marcus
AU  - Trost M
FAU - Wang, Zhanshan
AU  - Wang Z
FAU - Cheng, Xinbin
AU  - Cheng X
LA  - eng
PT  - Journal Article
PL  - United States
TA  - Opt Lett
JT  - Optics letters
JID - 7708433
EDAT- 2018/12/15 06:00
MHDA- 2018/12/15 06:01
CRDT- 2018/12/15 06:00
PHST- 2018/12/15 06:00 [entrez]
PHST- 2018/12/15 06:00 [pubmed]
PHST- 2018/12/15 06:01 [medline]
AID - 402938 [pii]
AID - 10.1364/OL.43.006025 [doi]
PST - ppublish
SO  - Opt Lett. 2018 Dec 15;43(24):6025-6028. doi: 10.1364/OL.43.006025.