PMID- 30715045 OWN - NLM STAT- PubMed-not-MEDLINE LR - 20201001 IS - 2072-666X (Print) IS - 2072-666X (Electronic) IS - 2072-666X (Linking) VI - 9 IP - 11 DP - 2018 Oct 25 TI - AlGaN/GaN High Electron Mobility Transistors on Semi-Insulating Ammono-GaN Substrates with Regrown Ohmic Contacts. LID - 10.3390/mi9110546 [doi] LID - 546 AB - AlGaN/GaN high electron mobility transistors on semi-insulating bulk ammonothermal GaN have been investigated. By application of regrown ohmic contacts, the problem with obtaining low resistance ohmic contacts to low-dislocation high electron mobility transistor (HEMT) structures was solved. The maximum output current was about 1 A/mm and contact resistances was in the range of 0.3(-)0.6 Omega .mm. Good microwave performance was obtained due to the absence of parasitic elements such as high access resistance. FAU - Wojtasiak, Wojciech AU - Wojtasiak W AUID- ORCID: 0000-0002-6422-7154 AD - Institute of Radioelectronics and Multimedia Technology, Warsaw University of Technology, Nowowiejska 15/19, 00-662 Warsaw, Poland. wwojtas@ire.pw.edu.pl. FAU - Goralczyk, Marcin AU - Goralczyk M AUID- ORCID: 0000-0001-7313-442X AD - Institute of Radioelectronics and Multimedia Technology, Warsaw University of Technology, Nowowiejska 15/19, 00-662 Warsaw, Poland. M.Goralczyk@ire.pw.edu.pl. FAU - Gryglewski, Daniel AU - Gryglewski D AUID- ORCID: 0000-0001-6824-9599 AD - Institute of Radioelectronics and Multimedia Technology, Warsaw University of Technology, Nowowiejska 15/19, 00-662 Warsaw, Poland. dgrygle@ire.pw.edu.pl. FAU - Zajac, Marcin AU - Zajac M AD - Ammono Lab, Institute of High Pressure Physics, Polish Academy of Sciences, Sokolowska 29/37, 01-142 Warsaw, Poland. zajac@ammono.com. FAU - Kucharski, Robert AU - Kucharski R AD - Ammono Lab, Institute of High Pressure Physics, Polish Academy of Sciences, Sokolowska 29/37, 01-142 Warsaw, Poland. kucharski@ammono.com. FAU - Prystawko, Pawel AU - Prystawko P AD - TopGaN Ltd., Sokolowska 29/37, 01-142 Warsaw, Poland. pawel.prystawko@unipress.waw.pl. AD - Institute of High Pressure Physics, Polish Academy of Sciences, Sokolowska 29/37, 01-142 Warsaw, Poland. pawel.prystawko@unipress.waw.pl. FAU - Piotrowska, Anna AU - Piotrowska A AD - Institute of Electron Technology, Al. Lotnikow 32/46, 02-668 Warsaw, Poland. ania@ite.waw.pl. FAU - Ekielski, Marek AU - Ekielski M AD - Institute of Electron Technology, Al. Lotnikow 32/46, 02-668 Warsaw, Poland. ekielski@ite.waw.pl. FAU - Kaminska, Eliana AU - Kaminska E AD - Institute of Electron Technology, Al. Lotnikow 32/46, 02-668 Warsaw, Poland. eliana@ite.waw.pl. FAU - Taube, Andrzej AU - Taube A AD - Institute of Electron Technology, Al. Lotnikow 32/46, 02-668 Warsaw, Poland. ataube@ite.waw.pl. FAU - Wzorek, Marek AU - Wzorek M AD - Institute of Electron Technology, Al. Lotnikow 32/46, 02-668 Warsaw, Poland. mwzorek@ite.waw.pl. LA - eng GR - PBS1/A3/9/2012/Narodowe Centrum Badan i Rozwoju/ PT - Journal Article DEP - 20181025 PL - Switzerland TA - Micromachines (Basel) JT - Micromachines JID - 101640903 PMC - PMC6266852 OTO - NOTNLM OT - AlGaN/GaN OT - ammonothermal GaN OT - high electron mobility transistor (HEMT) OT - high electron mobility transistors OT - ohmic contact OT - power amplifier OT - regrown contact COIS- The authors declare no conflict of interest. EDAT- 2019/02/05 06:00 MHDA- 2019/02/05 06:01 PMCR- 2018/10/25 CRDT- 2019/02/05 06:00 PHST- 2018/09/30 00:00 [received] PHST- 2018/10/20 00:00 [revised] PHST- 2018/10/21 00:00 [accepted] PHST- 2019/02/05 06:00 [entrez] PHST- 2019/02/05 06:00 [pubmed] PHST- 2019/02/05 06:01 [medline] PHST- 2018/10/25 00:00 [pmc-release] AID - mi9110546 [pii] AID - micromachines-09-00546 [pii] AID - 10.3390/mi9110546 [doi] PST - epublish SO - Micromachines (Basel). 2018 Oct 25;9(11):546. doi: 10.3390/mi9110546.