PMID- 30875973 OWN - NLM STAT- PubMed-not-MEDLINE LR - 20201001 IS - 2079-4991 (Print) IS - 2079-4991 (Electronic) IS - 2079-4991 (Linking) VI - 9 IP - 3 DP - 2019 Mar 15 TI - High-Performance Ultraviolet Light Detection Using Nano-Scale-Fin Isolation AlGaN/GaN Heterostructures with ZnO Nanorods. LID - 10.3390/nano9030440 [doi] LID - 440 AB - Owing to their intrinsic wide bandgap properties ZnO and GaN materials are widely used for fabricating passive-type visible-blind ultraviolet (UV) photodetectors (PDs). However, most of these PDs have a very low spectral responsivity R, which is not sufficient for detecting very low-level UV signals. We demonstrate an active type UV PD with a ZnO nanorod (NR) structure for the floating gate of AlGaN/GaN high electron mobility transistor (HEMT), where the AlGaN/GaN epitaxial layers are isolated by the nano-scale fins (NFIs) of two different fin widths (70 and 80 nm). In the dark condition, oxygen adsorbed at the surface of the ZnO NRs generates negative gate potential. Upon UV light illumination, the negative charge on the ZnO NRs is reduced due to desorption of oxygen, and this reversible process controls the source-drain carrier transport property of HEMT based PDs. The NFI PDs of a 70 nm fin width show the highest R of a ~3.2 x 10(7) A/W at 340 nm wavelength among the solid-state UV PDs reported to date. We also compare the performances of NFI PDs with those of conventional mesa isolation (MI, 40 x 100 microm(2)). NFI devices show ~100 times enhanced R and on-off current ratio than those of MI devices. Due to the volume effect of the small active region, a much faster response speed (rise-up and fall-off times of 0.21 and 1.05 s) is also obtained from the NFI PDs with a 70 nm fin width upon the UV on-off transient. FAU - Khan, Fasihullah AU - Khan F AUID- ORCID: 0000-0001-7566-8740 AD - Division of Electronics and Electrical Engineering, Dongguk University, Seoul 100-715, Korea. fasihullah.khan@dongguk.edu. FAU - Khan, Waqar AU - Khan W AUID- ORCID: 0000-0003-0123-6456 AD - Division of Electronics and Electrical Engineering, Dongguk University, Seoul 100-715, Korea. waqarkyz@gmail.com. FAU - Kim, Sam-Dong AU - Kim SD AD - Division of Electronics and Electrical Engineering, Dongguk University, Seoul 100-715, Korea. samdong@dongguk.edu. LA - eng GR - 2016006533/National Research Foundation of Korea/ GR - 2009-0082580/National Research Foundation of Korea/ PT - Journal Article DEP - 20190315 PL - Switzerland TA - Nanomaterials (Basel) JT - Nanomaterials (Basel, Switzerland) JID - 101610216 PMC - PMC6474106 OTO - NOTNLM OT - ZnO nanorods OT - high-responsivity OT - nano-scale fin isolation OT - two-dimensional electron gas OT - ultraviolet photodetectors OT - visible-blind OT - wide-band gap semiconductors COIS- The authors declare no conflicts of interest. EDAT- 2019/03/17 06:00 MHDA- 2019/03/17 06:01 PMCR- 2019/03/15 CRDT- 2019/03/17 06:00 PHST- 2019/02/24 00:00 [received] PHST- 2019/03/06 00:00 [revised] PHST- 2019/03/08 00:00 [accepted] PHST- 2019/03/17 06:00 [entrez] PHST- 2019/03/17 06:00 [pubmed] PHST- 2019/03/17 06:01 [medline] PHST- 2019/03/15 00:00 [pmc-release] AID - nano9030440 [pii] AID - nanomaterials-09-00440 [pii] AID - 10.3390/nano9030440 [doi] PST - epublish SO - Nanomaterials (Basel). 2019 Mar 15;9(3):440. doi: 10.3390/nano9030440.