PMID- 31121921 OWN - NLM STAT- PubMed-not-MEDLINE LR - 20201001 IS - 2072-666X (Print) IS - 2072-666X (Electronic) IS - 2072-666X (Linking) VI - 10 IP - 5 DP - 2019 May 22 TI - Development of Piezo-Actuated Two-Degree-of-Freedom Fast Tool Servo System. LID - 10.3390/mi10050337 [doi] LID - 337 AB - Fast tool servo (FTS) machining technology is a promising method for freeform surfaces and machining micro-nanostructure surfaces. However, limited degrees of freedom (DOF) is an inherent drawback of existing FTS technologies. In this paper, a piezo-actuated serial structure FTS system is developed to obtain translational motions along with z and x-axis directions for ultra-precision machining. In addition, the principle of the developed 2-DOF FTS is introduced and explained. A high-rigidity four-bar (HRFB) mechanism is proposed to produce motion along the z-axis direction. Additionally, through a micro-rotation motion around flexible bearing hinges (FBHs), bi-directional motions along the x-axis direction can be produced. The kinematics of the mechanism are described using a matrix-based compliance modeling (MCM) method, and then the static analysis and dynamic analysis are performed using finite element analysis (FEA). Testing experiments were conducted to investigate the actual performance of the developed system. The results show that low coupling, proper travel, and high natural frequency are obtained. Finally, a sinusoidal wavy surface is uniformly generated by the mechanism developed to demonstrate the effectiveness of the FTS system. FAU - Liu, Yamei AU - Liu Y AD - School of Mechatronic Engineering, Changchun University of Technology, Changchun 130012, China. liuym_cc@126.com. FAU - Zheng, Yanping AU - Zheng Y AD - School of Mechatronic Engineering, Changchun University of Technology, Changchun 130012, China. zhengyp117@163.com. FAU - Gu, Yan AU - Gu Y AUID- ORCID: 0000-0001-5468-6843 AD - School of Mechatronic Engineering, Changchun University of Technology, Changchun 130012, China. guyan@ccut.edu.cn. FAU - Lin, Jieqiong AU - Lin J AD - School of Mechatronic Engineering, Changchun University of Technology, Changchun 130012, China. linjieqiong@ccut.edu.cn. FAU - Lu, Mingming AU - Lu M AUID- ORCID: 0000-0001-8218-1623 AD - School of Mechatronic Engineering, Changchun University of Technology, Changchun 130012, China. lumm@ccut.edu.cn. FAU - Xu, Zisu AU - Xu Z AD - School of Mechatronic Engineering, Changchun University of Technology, Changchun 130012, China. 15568607008@163.com. FAU - Fu, Bin AU - Fu B AD - School of Mechatronic Engineering, Changchun University of Technology, Changchun 130012, China. fb3483306540@163.com. LA - eng GR - 2016YFE0105100/National Ministry of Science and Technology International Cooperation Project/ GR - 20140622008JC/Micro-Nano and Ultra-Precision Key Laboratory of Jilin Province/ GR - 20180623034TC, 20180201052GX, 20190201254JC, 20190302065GX/Science and Technology Development Projects of Jilin Province/ GR - JJKH20181036KJ/Jilin Provincial Education Department Scientific Research Planning Project/ PT - Journal Article DEP - 20190522 PL - Switzerland TA - Micromachines (Basel) JT - Micromachines JID - 101640903 PMC - PMC6562535 OTO - NOTNLM OT - 2-DOF FTS system OT - compliant mechanism OT - matrix based compliance modeling OT - piezoelectric actuator OT - ultra-precision machining COIS- The authors declare no conflict of interest. EDAT- 2019/05/28 06:00 MHDA- 2019/05/28 06:01 PMCR- 2019/05/22 CRDT- 2019/05/25 06:00 PHST- 2019/04/17 00:00 [received] PHST- 2019/05/15 00:00 [revised] PHST- 2019/05/20 00:00 [accepted] PHST- 2019/05/25 06:00 [entrez] PHST- 2019/05/28 06:00 [pubmed] PHST- 2019/05/28 06:01 [medline] PHST- 2019/05/22 00:00 [pmc-release] AID - mi10050337 [pii] AID - micromachines-10-00337 [pii] AID - 10.3390/mi10050337 [doi] PST - epublish SO - Micromachines (Basel). 2019 May 22;10(5):337. doi: 10.3390/mi10050337.