PMID- 31327893
OWN - NLM
STAT- PubMed-not-MEDLINE
LR  - 20200501
IS  - 0924-4247 (Print)
IS  - 0924-4247 (Linking)
VI  - 290
DP  - 2019 May 1
TI  - A One-step Residue-free Wet Etching Process of Ceramic PZT for Piezoelectric 
      Transducers.
PG  - 130-136
LID - 10.1016/j.sna.2019.03.028 [doi]
AB  - Lead zirconate titanate (PZT) has wide applications in microelectromechanical 
      systems (MEMS) due to its large piezoelectric coefficients. However, there exist 
      serious issues during PZT wet etching even with multiple etching steps, such as 
      residues on etching fronts and large undercut. In this paper, a one-step 
      residue-free wet etching process of ceramic PZT is developed with fluoroboric 
      acid. In this work, the design of experiments (DOE) method is employed to 
      minimize undercut and residues without sacrificing etching rate. The acid 
      concentration, temperature, and agitation are the process parameters considered 
      in the DOE. Through DOE analysis of the experimental data, an optimal recipe is 
      identified as the volume ratio of HBF(4):H(2)O=1:10 at 23  degrees C. This new PZT 
      etching recipe leads to a high etching rate (1.54 mum/min) with no observable 
      residues and a small undercut (0.78:1) as well as a high selectivity over the 
      photoresist (900:1). This etching recipe can be used for making various 
      piezoelectric transducers.
FAU - Wang, Haoran
AU  - Wang H
AD  - Department of Electrical and Computer Engineering, University of Florida, 
      Gainesville, USA.
FAU - Godara, Manish
AU  - Godara M
AD  - Department of Chemical Engineering, University of Florida, Gainesville, USA.
FAU - Chen, Zhenfang
AU  - Chen Z
AD  - MEMS Engineering and Materials Inc., Sunnyvale, USA.
FAU - Xie, Huikai
AU  - Xie H
AD  - Department of Electrical and Computer Engineering, University of Florida, 
      Gainesville, USA.
AD  - School of Information and Electronics, Beijing Institute of Technology, Beijing, 
      China.
LA  - eng
GR  - R01 EB020601/EB/NIBIB NIH HHS/United States
PT  - Journal Article
DEP - 20190319
PL  - Switzerland
TA  - Sens Actuators A Phys
JT  - Sensors and actuators. A, Physical
JID - 101137102
PMC - PMC6640860
MID - NIHMS1525435
OTO - NOTNLM
OT  - HBF4
OT  - PZT
OT  - PZT transducers
OT  - ceramic PZT
OT  - residue-free
OT  - wet etching
EDAT- 2019/07/23 06:00
MHDA- 2019/07/23 06:01
PMCR- 2020/05/01
CRDT- 2019/07/23 06:00
PHST- 2019/07/23 06:00 [entrez]
PHST- 2019/07/23 06:00 [pubmed]
PHST- 2019/07/23 06:01 [medline]
PHST- 2020/05/01 00:00 [pmc-release]
AID - 10.1016/j.sna.2019.03.028 [doi]
PST - ppublish
SO  - Sens Actuators A Phys. 2019 May 1;290:130-136. doi: 10.1016/j.sna.2019.03.028. 
      Epub 2019 Mar 19.