PMID- 31459048
OWN - NLM
STAT- PubMed-not-MEDLINE
LR  - 20201001
IS  - 2470-1343 (Electronic)
IS  - 2470-1343 (Linking)
VI  - 3
IP  - 8
DP  - 2018 Aug 31
TI  - Large-Scale Fabrication of High-Performance Ionic Polymer-Metal Composite 
      Flexible Sensors by in Situ Plasma Etching and Magnetron Sputtering.
PG  - 9146-9154
LID - 10.1021/acsomega.8b00877 [doi]
AB  - Flexible electronics has received widespread concern and research. As a 
      most-fundamental step and component, polymer metallization to introduce 
      conductive electrode is crucial in successful establishment and application of 
      flexible and stretchable electronic system. Ionic polymer-metal composite (IPMC) 
      is such an attractive flexible mechanical sensor with significant advantages of 
      passive and space-discriminative capability. Generally, the IPMC sensor is 
      fabricated by the electroless plating method to form structure of ionic polymer 
      membrane sandwiched with two metallic electrodes. In order to obtain high-quality 
      interface adhesion and conductivity between polymer and metal, the plating 
      process for IPMC sensor is usually time-consuming and uncontrollable and has low 
      reproducibility, which make it difficult to use in practice and in large-scale. 
      Here, a manufacturable method and equipment with short processing time and high 
      reproducibility for fabricating IPMC sensors by in situ plasma etching and 
      magnetron sputtering depositing on flexible substrates is developed. First, the 
      new method shortens the fabrication period greatly from 2 weeks to 2 h to obtain 
      IPMC sensors with sizes up to 9 cm x 9 cm or arrays in various patterns. Second, 
      the integrated operation ensures all sample batch stability and performance 
      repeatability. In a typical IPMC sensor, nearly 200 mV potential signal due to 
      ion redistribution induced by bending strain under 1.6% can be produced without 
      any external power supply, which is much higher than the traditional electroless 
      plating sensor. This work verified that the in situ plasma etching and magnetron 
      sputtering deposition could significantly increase the interface and surface 
      conductivity of the flexible devices, resulting in the present high sensitivity 
      as well as linear correlation with strain of the IPMC sensor. Therefore, this 
      introduced method is scalable and believed to be used to metalize flexible 
      substrates with different metals, providing a new route to large-scale 
      fabrication of flexible devices for potential wearable applications in real-time 
      monitoring human motion and human-machine interaction.
FAU - Fu, Ruoping
AU  - Fu R
AD  - Department of Chemistry, College of Sciences, Shanghai University, Shanghai 
      200444, P. R. China.
AD  - i-Lab, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of 
      Sciences, Suzhou 215123, P. R. China.
FAU - Yang, Ying
AU  - Yang Y
AD  - i-Lab, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of 
      Sciences, Suzhou 215123, P. R. China.
FAU - Lu, Chao
AU  - Lu C
AD  - i-Lab, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of 
      Sciences, Suzhou 215123, P. R. China.
FAU - Ming, Yue
AU  - Ming Y
AD  - i-Lab, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of 
      Sciences, Suzhou 215123, P. R. China.
FAU - Zhao, Xinxin
AU  - Zhao X
AD  - i-Lab, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of 
      Sciences, Suzhou 215123, P. R. China.
FAU - Hu, Yimin
AU  - Hu Y
AD  - i-Lab, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of 
      Sciences, Suzhou 215123, P. R. China.
FAU - Zhao, Lei
AU  - Zhao L
AD  - i-Lab, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of 
      Sciences, Suzhou 215123, P. R. China.
FAU - Hao, Jian
AU  - Hao J
AD  - Department of Chemistry, College of Sciences, Shanghai University, Shanghai 
      200444, P. R. China.
FAU - Chen, Wei
AU  - Chen W
AD  - i-Lab, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of 
      Sciences, Suzhou 215123, P. R. China.
AD  - Nanotechnology Centre for Intelligent Textiles and Apparel, Institute of Textiles 
      and Clothing, The Hong Kong Polytechnic University, Kowloon, Hong Kong 999077, P. 
      R. China.
LA  - eng
PT  - Journal Article
DEP - 20180815
PL  - United States
TA  - ACS Omega
JT  - ACS omega
JID - 101691658
PMC - PMC6644406
COIS- The authors declare no competing financial interest.
EDAT- 2019/08/29 06:00
MHDA- 2019/08/29 06:01
PMCR- 2018/08/15
CRDT- 2019/08/29 06:00
PHST- 2018/05/02 00:00 [received]
PHST- 2018/08/01 00:00 [accepted]
PHST- 2019/08/29 06:00 [entrez]
PHST- 2019/08/29 06:00 [pubmed]
PHST- 2019/08/29 06:01 [medline]
PHST- 2018/08/15 00:00 [pmc-release]
AID - 10.1021/acsomega.8b00877 [doi]
PST - epublish
SO  - ACS Omega. 2018 Aug 15;3(8):9146-9154. doi: 10.1021/acsomega.8b00877. eCollection 
      2018 Aug 31.