PMID- 31574971 OWN - NLM STAT- PubMed-not-MEDLINE LR - 20201001 IS - 2072-666X (Print) IS - 2072-666X (Electronic) IS - 2072-666X (Linking) VI - 10 IP - 10 DP - 2019 Sep 30 TI - Stretchable Piezoelectric Power Generators Based on ZnO Thin Films on Elastic Substrates. LID - 10.3390/mi10100661 [doi] LID - 661 AB - The paper describes a stretchable, microfabricated power generator that will be attached on the skin and will produce energy based on the movements of the human body. The device was fabricated on a polymeric, elastomeric, poly(dimethylsiloxane) (PDMS) sheet. It consists of a piezoelectric thin film of ZnO sandwiched between two stretchable gold electrodes. An innovative technique was used for the deposition of ZnO thin film on the gold electrode-coated polymeric substrate at low temperatures below 150 degrees C. This is the first attempt to use a uniform film of ZnO, for energy harvesting. The ZnO film had the thickness at the submicron scale and the surface at the centimeter scale. We demonstrated that under a strain of 8% the voltage output from this power generator was equal to 2 V, the power output was equal to 160 muW and the corresponding power density was 1.27 mW/cm(2). This device has great potential for application in power sensors attached on the human body, such as temperature sensors or wearable electrocardiography systems. FAU - Voiculescu, Ioana AU - Voiculescu I AD - Mechanical Engineering Department, City College of New York, New York, NY 10031, USA. voicules@ccny.cuny.edu. FAU - Li, Fang AU - Li F AD - Mechanical Engineering Department, New York Institute of Technology, New York, NY 11568, USA. fli08@nyit.edu. FAU - Kowach, Glen AU - Kowach G AD - Chemistry and Biochemistry Department, City College of New York, New York, NY 10031, USA. gkowach@ccny.cuny.edu. FAU - Lee, Kun-Lin AU - Lee KL AD - Mechanical Engineering Department, City College of New York, New York, NY 10031, USA. FAU - Mistou, Nicolas AU - Mistou N AD - Mechanical Engineering Department, University of Montpellier, 34095 Montpellier, France. nicolas.mistou@etu.umontpellier.fr. FAU - Kastberg, Russell AU - Kastberg R AD - Mechanical Engineering Department, City College of New York, New York, NY 10031, USA. rkastberg205@gmail.com. LA - eng GR - W911NF-13-D-0001/Army Research Laboratory/ PT - Journal Article DEP - 20190930 PL - Switzerland TA - Micromachines (Basel) JT - Micromachines JID - 101640903 PMC - PMC6843214 OTO - NOTNLM OT - ZnO nanofilm OT - piezoelectric energy harvesting OT - stretchable power generator OT - wearable power generator COIS- The authors declare no conflict of interest. The funders had no role in the design of the study; in the collection, analyses, or interpretation of data; in the writing of the manuscript; and in the decision to publish the results. EDAT- 2019/10/03 06:00 MHDA- 2019/10/03 06:01 PMCR- 2019/09/30 CRDT- 2019/10/03 06:00 PHST- 2019/09/03 00:00 [received] PHST- 2019/09/29 00:00 [revised] PHST- 2019/09/29 00:00 [accepted] PHST- 2019/10/03 06:00 [entrez] PHST- 2019/10/03 06:00 [pubmed] PHST- 2019/10/03 06:01 [medline] PHST- 2019/09/30 00:00 [pmc-release] AID - mi10100661 [pii] AID - micromachines-10-00661 [pii] AID - 10.3390/mi10100661 [doi] PST - epublish SO - Micromachines (Basel). 2019 Sep 30;10(10):661. doi: 10.3390/mi10100661.