PMID- 31746614 OWN - NLM STAT- PubMed-not-MEDLINE LR - 20200304 IS - 1520-5827 (Electronic) IS - 0743-7463 (Linking) VI - 35 IP - 50 DP - 2019 Dec 17 TI - Comparison of In-Plane Stress Development in Sol-Gel- and Nanoparticle-Derived Mesoporous Metal Oxide Thin Films. PG - 16427-16437 LID - 10.1021/acs.langmuir.9b02455 [doi] AB - By using an evaporation-induced self-assembly (EISA) process, mesoporous metal oxide thin films are prepared via molecular precursors undergoing a sol-gel transition or by using nanoparticle dispersions as the starting materials. Both methods are employed together with PIB(50)-b-PEO(45) as the structure-directing agent to produce porous TiO(2) and ZrO(2) thin films with spherical mesopores of around 14 nm in diameter. These nanoparticle- and sol-gel-derived films were investigated in terms of the intrinsic in-plane stress development during the heat treatment up to 500 degrees C to evaluate the impact of solvent evaporation, template decomposition and crystallization on the mechanical state of the film. The investigation revealed the lowest intrinsic stress for the nanoparticle-derived mesoporous film, which is assigned to the combination of the relaxing effects of the utilized diblock copolymer and the interparticular gaps between the precrystalline nanoparticles. Furthermore, the residual in-plane stress was studied after annealing steps ranging from 300 to 1000 degrees C and cooling down to room temperature. Here, TiO(2) nanoparticle-derived mesoporous films possess a lower residual stress than the sol-gel-derived mesoporous films, while in the case of ZrO(2) films, sol-gel-derived coatings reveal the smallest residual stress. The latter is based on the lower thermal expansion coefficient of the dominant monoclinic crystal phase compared to that of the silicon substrate. Hence, the present crystal structure has a strong influence on the mechanical state. The observation in this study helps to further understand the stress-related mechanical properties and the formation of mesoporous metal oxides. FAU - Cop, Pascal AU - Cop P AD - Physikalisch-Chemisches Institut , Justus Liebig University , Heinrich-Buff-Ring 17 , 35392 Giessen , Germany. AD - Center of Materials Research , Justus Liebig University , Heinrich-Buff-Ring 16 , 35392 Giessen , Germany. FAU - Hess, Kevin AU - Hess K AD - Physikalisch-Chemisches Institut , Justus Liebig University , Heinrich-Buff-Ring 17 , 35392 Giessen , Germany. AD - Center of Materials Research , Justus Liebig University , Heinrich-Buff-Ring 16 , 35392 Giessen , Germany. AD - Department of Chemistry and Materials Engineering , Kansai University , 3-3-35 Yamate-cho , Suita , Osaka 564-8680 , Japan. FAU - Werner, Sebastian AU - Werner S AD - Physikalisch-Chemisches Institut , Justus Liebig University , Heinrich-Buff-Ring 17 , 35392 Giessen , Germany. AD - Center of Materials Research , Justus Liebig University , Heinrich-Buff-Ring 16 , 35392 Giessen , Germany. FAU - Meinusch, Rafael AU - Meinusch R AD - Physikalisch-Chemisches Institut , Justus Liebig University , Heinrich-Buff-Ring 17 , 35392 Giessen , Germany. AD - Center of Materials Research , Justus Liebig University , Heinrich-Buff-Ring 16 , 35392 Giessen , Germany. FAU - Smarsly, Bernd M AU - Smarsly BM AUID- ORCID: 0000-0001-8452-2663 AD - Physikalisch-Chemisches Institut , Justus Liebig University , Heinrich-Buff-Ring 17 , 35392 Giessen , Germany. AD - Center of Materials Research , Justus Liebig University , Heinrich-Buff-Ring 16 , 35392 Giessen , Germany. FAU - Kozuka, Hiromitsu AU - Kozuka H AUID- ORCID: 0000-0002-3385-215X AD - Department of Chemistry and Materials Engineering , Kansai University , 3-3-35 Yamate-cho , Suita , Osaka 564-8680 , Japan. LA - eng PT - Journal Article DEP - 20191205 PL - United States TA - Langmuir JT - Langmuir : the ACS journal of surfaces and colloids JID - 9882736 SB - IM EDAT- 2019/11/21 06:00 MHDA- 2019/11/21 06:01 CRDT- 2019/11/21 06:00 PHST- 2019/11/21 06:00 [pubmed] PHST- 2019/11/21 06:01 [medline] PHST- 2019/11/21 06:00 [entrez] AID - 10.1021/acs.langmuir.9b02455 [doi] PST - ppublish SO - Langmuir. 2019 Dec 17;35(50):16427-16437. doi: 10.1021/acs.langmuir.9b02455. Epub 2019 Dec 5.