PMID- 32028701 OWN - NLM STAT- PubMed-not-MEDLINE LR - 20200928 IS - 2072-666X (Print) IS - 2072-666X (Electronic) IS - 2072-666X (Linking) VI - 11 IP - 2 DP - 2020 Feb 3 TI - Microlens Fabrication by Replica Molding of Electro-Hydrodynamic Printing Liquid Mold. LID - 10.3390/mi11020161 [doi] LID - 161 AB - In this paper, we synergistically combine electrohydrodynamic (EHD) printing and replica molding for the fabrication of microlenses. Glycerol solution microdroplets was sprayed onto the ITO glass to form liquid mold by an EHD printing process. The liquid mold is used as a master to fabricate a polydimethylsiloxane (PDMS) mold. Finally, the desired micro-optical device can be fabricated on any substrate using a PDMS soft lithography mold. We demonstrate our strategy by generating microlenses of photocurable polymers and by characterizing their optical properties. It is a new method to rapidly and cost-effectively fabricate molds with small diameters by exploiting the advantages of EHD printing, while maintaining the parallel nature of soft-lithography. FAU - Fang, Feiyu AU - Fang F AD - State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China. AD - Guangdong Provincial Key Laboratory of Micro-Nano Manufacturing Technology and Equipment, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China. AD - Guangdong Provincial Jihua Laboratory, Foshan 528000, China. FAU - Tao, Xulei AU - Tao X AD - State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China. AD - Guangdong Provincial Key Laboratory of Micro-Nano Manufacturing Technology and Equipment, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China. AD - Guangdong Provincial Jihua Laboratory, Foshan 528000, China. FAU - Chen, Xun AU - Chen X AD - State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China. AD - Guangdong Provincial Key Laboratory of Micro-Nano Manufacturing Technology and Equipment, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China. FAU - Wang, Han AU - Wang H AD - State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China. AD - Guangdong Provincial Key Laboratory of Micro-Nano Manufacturing Technology and Equipment, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China. AD - Guangdong Provincial Jihua Laboratory, Foshan 528000, China. FAU - Wu, Peixuan AU - Wu P AD - State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China. AD - Guangdong Provincial Key Laboratory of Micro-Nano Manufacturing Technology and Equipment, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China. FAU - Zhang, Jiarong AU - Zhang J AD - State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China. AD - Guangdong Provincial Key Laboratory of Micro-Nano Manufacturing Technology and Equipment, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China. FAU - Zeng, Jun AU - Zeng J AD - State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China. AD - Guangdong Provincial Key Laboratory of Micro-Nano Manufacturing Technology and Equipment, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China. FAU - Zhu, Zimin AU - Zhu Z AD - State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China. AD - Guangdong Provincial Key Laboratory of Micro-Nano Manufacturing Technology and Equipment, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China. FAU - Liu, Zhen AU - Liu Z AD - Department of Physics and Engineering, Frostburg State University, Frostburg, MD 21532, USA. LA - eng GR - 2017B090911012/Science and Technology Project of Guangdong Province/ GR - 201709P05/University Innovation and Entrepreneurship Education Major Project of Guangzhou City/ GR - 2015IT100152/Project of Science and Technology of Foshan City/ GR - 2017B030314178/Key Laboratory Construction Projects in Guangdong/ GR - X190071UZ190/Project of Jihua Laboratory/ GR - 201803010065/Science and Technology Program of Guangzhou, China/ PT - Journal Article DEP - 20200203 PL - Switzerland TA - Micromachines (Basel) JT - Micromachines JID - 101640903 PMC - PMC7074626 OTO - NOTNLM OT - electrohydrodynamic printing OT - microlenses OT - replica molding OT - soft lithography COIS- The authors declare no conflict of interest. EDAT- 2020/02/08 06:00 MHDA- 2020/02/08 06:01 PMCR- 2020/02/03 CRDT- 2020/02/08 06:00 PHST- 2019/12/11 00:00 [received] PHST- 2020/01/10 00:00 [revised] PHST- 2020/01/23 00:00 [accepted] PHST- 2020/02/08 06:00 [entrez] PHST- 2020/02/08 06:00 [pubmed] PHST- 2020/02/08 06:01 [medline] PHST- 2020/02/03 00:00 [pmc-release] AID - mi11020161 [pii] AID - micromachines-11-00161 [pii] AID - 10.3390/mi11020161 [doi] PST - epublish SO - Micromachines (Basel). 2020 Feb 3;11(2):161. doi: 10.3390/mi11020161.