PMID- 32365472 OWN - NLM STAT- PubMed-not-MEDLINE LR - 20200928 IS - 2072-666X (Print) IS - 2072-666X (Electronic) IS - 2072-666X (Linking) VI - 11 IP - 5 DP - 2020 Apr 29 TI - Fabrication of Subretinal 3D Microelectrodes with Hexagonal Arrangement. LID - 10.3390/mi11050467 [doi] LID - 467 AB - This study presents the fabrication of three-dimensional (3D) microelectrodes for subretinal stimulation, to accommodate adjacent return electrodes surrounding a stimulating electrode. For retinal prosthetic devices, the arrangement of return electrodes, the electrode size and spacing should be considered together, to reduce the undesired dissipation of electric currents. Here, we applied the hexagonal arrangement to the microelectrode array for the localized activation of retinal cells and better visual acuity. To provide stimuli more efficiently to non-spiking neurons, a 3D structure was created through a customized pressing process, utilizing the elastic property of the materials used in the fabrication processes. The diameter and pitch of the Pt-coated electrodes were 150 mum and 350 mum, respectively, and the height of the protruded electrodes was around 20 mum. The array consisted of 98 hexagonally arranged electrodes, supported by a flexible and transparent polydimethylsiloxane (PDMS) base, with a thickness of 140 mum. Also, the array was coated with 2 mum-thick parylene-C, except the active electrode sites, for more focused stimulation. Finally, the electrochemical properties of the fabricated microelectrodes were characterized, resulting in the mean impedance of 384.87 kOmega at 1 kHz and the charge storage capacity (CSC) of 2.83 mC.cm(-2). The fabricated microelectrodes are to be combined with an integrated circuit (IC) for additional in vitro and in vivo experiments. FAU - Seo, Hee Won AU - Seo HW AUID- ORCID: 0000-0003-0646-9806 AD - Department of Robotics Engineering, Daegu Gyeongbuk Institute of Science and Technology (DGIST), Daegu 42988, Korea. FAU - Kim, Namju AU - Kim N AD - Department of Robotics Engineering, Daegu Gyeongbuk Institute of Science and Technology (DGIST), Daegu 42988, Korea. FAU - Kim, Sohee AU - Kim S AUID- ORCID: 0000-0002-4926-8978 AD - Department of Robotics Engineering, Daegu Gyeongbuk Institute of Science and Technology (DGIST), Daegu 42988, Korea. LA - eng GR - NRF-2017M3A9E2056463/National Research Foundation of Korea/ PT - Journal Article DEP - 20200429 PL - Switzerland TA - Micromachines (Basel) JT - Micromachines JID - 101640903 PMC - PMC7281732 OTO - NOTNLM OT - 3D electrodes OT - hexagonal electrodes OT - retinal implant OT - subretinal stimulation OT - transparent base COIS- The authors declare no conflict of interest. EDAT- 2020/05/06 06:00 MHDA- 2020/05/06 06:01 PMCR- 2020/04/29 CRDT- 2020/05/06 06:00 PHST- 2020/03/29 00:00 [received] PHST- 2020/04/26 00:00 [revised] PHST- 2020/04/27 00:00 [accepted] PHST- 2020/05/06 06:00 [entrez] PHST- 2020/05/06 06:00 [pubmed] PHST- 2020/05/06 06:01 [medline] PHST- 2020/04/29 00:00 [pmc-release] AID - mi11050467 [pii] AID - micromachines-11-00467 [pii] AID - 10.3390/mi11050467 [doi] PST - epublish SO - Micromachines (Basel). 2020 Apr 29;11(5):467. doi: 10.3390/mi11050467.