PMID- 32489093 OWN - NLM STAT- PubMed-not-MEDLINE LR - 20200814 IS - 1520-6882 (Electronic) IS - 0003-2700 (Linking) VI - 92 IP - 15 DP - 2020 Aug 4 TI - In Situ Real-Time Monitoring of ITO Film under a Chemical Etching Process Using Fourier Transform Electrochemical Impedance Spectroscopy. PG - 10504-10511 LID - 10.1021/acs.analchem.0c01294 [doi] AB - As a novel approach to the in situ real-time investigation of an ITO electrode during the wet etching process, step-excitation Fourier-transform electrochemical impedance spectroscopy (FT-EIS) was implemented. The equivalent circuit parameters (e.g., R(ct), C(dl)) continuously obtained by the FT-EIS measurements during the entire etching process showed an electrode activation at the initial period as well as the completion of etching. The FT-EIS results were further validated by cyclic voltammograms and impedance measurements of partially etched ITO films using ferri- and ferrocyanide solution in combination with FESEM imaging, EDS, XRD analyses, and COMSOL simulation. We also demonstrated that this technique can be further utilized to obtain intact interdigitated array (IDA) electrodes in a reproducible manner, which is generally considered to be quite tricky due to delicacy of the pattern. Given that the FT-EIS allows for instantaneous snapshots of the electrode at every moment, this work may hold promise for in situ real-time examination of structural, electrokinetic, or mass transfer-related information on electrochemical systems undergoing constantly changing, transient processes including etching, which would be impossible with conventional electroanalytical techniques. FAU - Han, Seok Hee AU - Han SH AD - Department of Chemistry, Seoul National University, Seoul 08826, South Korea. FAU - Rho, Jihun AU - Rho J AD - Department of Chemistry, Seoul National University, Seoul 08826, South Korea. FAU - Lee, Sunmi AU - Lee S AD - Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University, Suwon-Si, Gyeonggi-do 16229, South Korea. FAU - Kim, Moonjoo AU - Kim M AD - Department of Chemistry, Seoul National University, Seoul 08826, South Korea. FAU - Kim, Sung Il AU - Kim SI AD - Department of Chemistry, Seoul National University, Seoul 08826, South Korea. FAU - Park, Sangmee AU - Park S AD - Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University, Suwon-Si, Gyeonggi-do 16229, South Korea. FAU - Jang, Woohyuk AU - Jang W AD - Department of Chemistry, Seoul National University, Seoul 08826, South Korea. FAU - Lee, Chang Heon AU - Lee CH AD - Department of Chemistry, Seoul National University, Seoul 08826, South Korea. FAU - Chang, Byoung-Yong AU - Chang BY AD - Department of Chemistry, Pukyong University, Busan 48513, South Korea. FAU - Chung, Taek Dong AU - Chung TD AUID- ORCID: 0000-0003-1092-8550 AD - Department of Chemistry, Seoul National University, Seoul 08826, South Korea. AD - Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University, Suwon-Si, Gyeonggi-do 16229, South Korea. AD - Advanced Institute of Convergence Technology, Suwon-Si, Gyeonggi-do 16229, South Korea. LA - eng PT - Journal Article DEP - 20200615 PL - United States TA - Anal Chem JT - Analytical chemistry JID - 0370536 SB - IM EDAT- 2020/06/04 06:00 MHDA- 2020/06/04 06:01 CRDT- 2020/06/04 06:00 PHST- 2020/06/04 06:00 [pubmed] PHST- 2020/06/04 06:01 [medline] PHST- 2020/06/04 06:00 [entrez] AID - 10.1021/acs.analchem.0c01294 [doi] PST - ppublish SO - Anal Chem. 2020 Aug 4;92(15):10504-10511. doi: 10.1021/acs.analchem.0c01294. Epub 2020 Jun 15.