PMID- 32680090
OWN - NLM
STAT- PubMed-not-MEDLINE
LR  - 20200720
IS  - 1094-4087 (Electronic)
IS  - 1094-4087 (Linking)
VI  - 28
IP  - 14
DP  - 2020 Jul 6
TI  - Stepped laser-ablation fabrication of concave micromirrors in rectangular optical 
      waveguides for low loss vertical coupling.
PG  - 20264-20276
LID - 10.1364/OE.395458 [doi]
AB  - In this report, we present a stepped laser-ablation method for the fabrication of 
      concave micromirrors in rectangular optical waveguides. The numerically simulated 
      vertical coupling loss of the reflection of the concave micromirror can be 
      reduced to 1.53 dB. The processing parameters of the utilized excimer laser, such 
      as the step number, width, and depth, were optimized to fabricate the concave 
      micromirrors. After the thermal reflow process, the measured curve of the 
      circular concave micromirrors obtained using a 3D optical profiler agreed well 
      with a standard circle with a surface roughness of 39.56 nm. Furthermore, 
      vertical coupling for 62.5 microm MMF revealed that the loss of the circular concave 
      micromirror coated with a 50 nm thick Au film is as low as 1.83 dB, corresponding 
      to a high coupling efficiency of 65.61%. This new, convenient, and efficient 
      fabrication technology for the fabrication of concave micromirrors can be applied 
      to vertical coupling for optical printed circuit board (OPCB) interconnection 
      technology.
FAU - Deng, Chuanlu
AU  - Deng C
FAU - Wang, Xueting
AU  - Wang X
FAU - Zhang, Ruhuan
AU  - Zhang R
FAU - Huang, Yi
AU  - Huang Y
FAU - Zhang, Xiaobei
AU  - Zhang X
FAU - Wang, Tingyun
AU  - Wang T
LA  - eng
PT  - Journal Article
PL  - United States
TA  - Opt Express
JT  - Optics express
JID - 101137103
SB  - IM
EDAT- 2020/07/19 06:00
MHDA- 2020/07/19 06:01
CRDT- 2020/07/19 06:00
PHST- 2020/07/19 06:00 [entrez]
PHST- 2020/07/19 06:00 [pubmed]
PHST- 2020/07/19 06:01 [medline]
AID - 432904 [pii]
AID - 10.1364/OE.395458 [doi]
PST - ppublish
SO  - Opt Express. 2020 Jul 6;28(14):20264-20276. doi: 10.1364/OE.395458.