PMID- 32752794
OWN - NLM
STAT- PubMed-not-MEDLINE
LR  - 20200805
IS  - 1089-7623 (Electronic)
IS  - 0034-6748 (Linking)
VI  - 91
IP  - 7
DP  - 2020 Jul 1
TI  - Application of electrospray-scanning mobility particle sizer for the measurement 
      of sub-10 nm chemical mechanical planarization slurry abrasive size distribution.
PG  - 075117
LID - 10.1063/5.0007167 [doi]
AB  - A scanning mobility particle sizer (SMPS) was used for measuring the size of a 
      sub-10 nm chemical mechanical planarization slurry abrasive. An atomizer and an 
      electrospray were used for aerosolization of slurry abrasives. It was difficult 
      to measure the exact particle size distribution using the atomizer due to the 
      agglomeration peak generated by the relatively large droplet size. However, the 
      electrospray-SMPS (ES-SMPS) measurement result well matched with that of the 
      transmission electron microscopy analysis without the agglomeration peak as ES is 
      known to generate a relatively small droplet during aerosolization. The particle 
      size distribution of the two sub-10 nm ceria slurries was measured using the 
      ES-SMPS. To avoid the dispersion stability issue due to the pH change, pH 
      adjustment was required when the sample was diluted.
FAU - Kwak, Donggeon
AU  - Kwak D
AUID- ORCID: 0000000277683466
AD  - Department of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, South 
      Korea.
FAU - Kim, Juhwan
AU  - Kim J
AUID- ORCID: 0000000328106141
AD  - Department of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, South 
      Korea.
FAU - Oh, Seungjun
AU  - Oh S
AUID- ORCID: 0000000335251371
AD  - Department of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, South 
      Korea.
FAU - Bae, Chulwoo
AU  - Bae C
AUID- ORCID: 000000015350469X
AD  - SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon 
      16419, South Korea.
FAU - Kim, Taesung
AU  - Kim T
AUID- ORCID: 0000000162807668
AD  - Department of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, South 
      Korea.
LA  - eng
PT  - Journal Article
PL  - United States
TA  - Rev Sci Instrum
JT  - The Review of scientific instruments
JID - 0405571
SB  - IM
EDAT- 2020/08/06 06:00
MHDA- 2020/08/06 06:01
CRDT- 2020/08/06 06:00
PHST- 2020/08/06 06:00 [entrez]
PHST- 2020/08/06 06:00 [pubmed]
PHST- 2020/08/06 06:01 [medline]
AID - 10.1063/5.0007167 [doi]
PST - ppublish
SO  - Rev Sci Instrum. 2020 Jul 1;91(7):075117. doi: 10.1063/5.0007167.