PMID- 32895395
OWN - NLM
STAT- PubMed-not-MEDLINE
LR  - 20220731
IS  - 2045-2322 (Electronic)
IS  - 2045-2322 (Linking)
VI  - 10
IP  - 1
DP  - 2020 Sep 7
TI  - Two-dimensional BN buffer for plasma enhanced atomic layer deposition of 
      Al(2)O(3) gate dielectrics on graphene field effect transistors.
PG  - 14699
LID - 10.1038/s41598-020-71108-5 [doi]
LID - 14699
AB  - Here, we investigate the use of few-layer metal organic chemical vapor deposition 
      (MOCVD) grown BN as a two-dimensional buffer layer for plasma enhanced atomic 
      layer deposition (PE-ALD) of Al(2)O(3) on graphene for top gated field effect 
      transistors (FETs). The reactive nature of PE-ALD enables deposition of thin 
      (2 nm) dielectrics directly on graphene and other two-dimensional materials 
      without the need for a seed or functionalization layer; however, this also leads 
      to significant oxidation of the graphene layer as observed by Raman. In FETs, we 
      find this oxidation destroys conductivity in the graphene channel. By 
      transferring thin (1.6 nm) MOCVD BN layers on top of graphene channels prior to 
      PE-ALD, the graphene is protected from oxidation enabling BN/Al(2)O(3) layers as 
      thin as 4 nm. Raman and X-ray photoelectron spectroscopy on BN films show no 
      significant oxidation caused by PE-ALD of Al(2)O(3). Inserting the BN layer 
      creates an atomically abrupt interface significantly reducing interface charges 
      between the graphene and Al(2)O(3) as compared to use of a 2 nm Al buffer layer. 
      This results in a much smaller Dirac voltage (- 1 V) and hysteresis (0.9 V) when 
      compared to FETs with the Al layer (V(Dirac) = - 6.1 V and hysteresis = 2.9 V).
FAU - Snure, Michael
AU  - Snure M
AD  - Air Force Research Laboratory, Sensors Directorate, Wright Patterson, AFB, 45433, 
      USA. michael.snure.1@us.af.mil.
FAU - Vangala, Shivashankar R
AU  - Vangala SR
AD  - Air Force Research Laboratory, Sensors Directorate, Wright Patterson, AFB, 45433, 
      USA.
FAU - Prusnick, Timothy
AU  - Prusnick T
AD  - KBR, Beavercreek, OH, 45433, USA.
FAU - Grzybowski, Gordon
AU  - Grzybowski G
AD  - KBR, Beavercreek, OH, 45433, USA.
FAU - Crespo, Antonio
AU  - Crespo A
AD  - Air Force Research Laboratory, Sensors Directorate, Wright Patterson, AFB, 45433, 
      USA.
FAU - Leedy, Kevin D
AU  - Leedy KD
AD  - Air Force Research Laboratory, Sensors Directorate, Wright Patterson, AFB, 45433, 
      USA.
LA  - eng
GR  - FA9550-19RYCOR050/Air Force Office of Scientific Research/
GR  - FA9550-19RYCOR050/Air Force Office of Scientific Research/
GR  - FA9550-19RYCOR050/Air Force Office of Scientific Research/
PT  - Journal Article
DEP - 20200907
PL  - England
TA  - Sci Rep
JT  - Scientific reports
JID - 101563288
SB  - IM
PMC - PMC7477096
COIS- The authors declare no competing interests.
EDAT- 2020/09/09 06:00
MHDA- 2020/09/09 06:01
PMCR- 2020/09/07
CRDT- 2020/09/08 05:20
PHST- 2020/04/01 00:00 [received]
PHST- 2020/08/05 00:00 [accepted]
PHST- 2020/09/08 05:20 [entrez]
PHST- 2020/09/09 06:00 [pubmed]
PHST- 2020/09/09 06:01 [medline]
PHST- 2020/09/07 00:00 [pmc-release]
AID - 10.1038/s41598-020-71108-5 [pii]
AID - 71108 [pii]
AID - 10.1038/s41598-020-71108-5 [doi]
PST - epublish
SO  - Sci Rep. 2020 Sep 7;10(1):14699. doi: 10.1038/s41598-020-71108-5.